JPS5378165A - Cutting method for semiconductor substrate - Google Patents
Cutting method for semiconductor substrateInfo
- Publication number
- JPS5378165A JPS5378165A JP15471476A JP15471476A JPS5378165A JP S5378165 A JPS5378165 A JP S5378165A JP 15471476 A JP15471476 A JP 15471476A JP 15471476 A JP15471476 A JP 15471476A JP S5378165 A JPS5378165 A JP S5378165A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- cutting method
- substrate
- cutting
- cutter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To prevent contamination of substrate and to cool the cutter, by cutting the substrate with immersed substrate in water.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15471476A JPS5378165A (en) | 1976-12-22 | 1976-12-22 | Cutting method for semiconductor substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15471476A JPS5378165A (en) | 1976-12-22 | 1976-12-22 | Cutting method for semiconductor substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5378165A true JPS5378165A (en) | 1978-07-11 |
Family
ID=15590347
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15471476A Pending JPS5378165A (en) | 1976-12-22 | 1976-12-22 | Cutting method for semiconductor substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5378165A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04180651A (en) * | 1990-11-15 | 1992-06-26 | Nec Kyushu Ltd | Manufacture of semiconductor device |
US7692440B2 (en) * | 2002-10-29 | 2010-04-06 | Advanced Systems Automation Limited | Handler for semiconductor singulation and method therefor |
-
1976
- 1976-12-22 JP JP15471476A patent/JPS5378165A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04180651A (en) * | 1990-11-15 | 1992-06-26 | Nec Kyushu Ltd | Manufacture of semiconductor device |
US7692440B2 (en) * | 2002-10-29 | 2010-04-06 | Advanced Systems Automation Limited | Handler for semiconductor singulation and method therefor |
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