JPS53120285A - Manufacture of semiconductor - Google Patents

Manufacture of semiconductor

Info

Publication number
JPS53120285A
JPS53120285A JP3584877A JP3584877A JPS53120285A JP S53120285 A JPS53120285 A JP S53120285A JP 3584877 A JP3584877 A JP 3584877A JP 3584877 A JP3584877 A JP 3584877A JP S53120285 A JPS53120285 A JP S53120285A
Authority
JP
Japan
Prior art keywords
semiconductor
manufacture
formation
injecting
changing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3584877A
Other languages
Japanese (ja)
Other versions
JPS5643668B2 (en
Inventor
Katsuyuki Inayoshi
Masataka Shinguu
Yasuhisa Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP3584877A priority Critical patent/JPS53120285A/en
Publication of JPS53120285A publication Critical patent/JPS53120285A/en
Publication of JPS5643668B2 publication Critical patent/JPS5643668B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Non-Volatile Memory (AREA)

Abstract

PURPOSE: To secure formation of each region with use of only one sheet of the photo mask by changing the injection energy after formation of the metal mask and then injecting the impurity ion.
COPYRIGHT: (C)1978,JPO&Japio
JP3584877A 1977-03-29 1977-03-29 Manufacture of semiconductor Granted JPS53120285A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3584877A JPS53120285A (en) 1977-03-29 1977-03-29 Manufacture of semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3584877A JPS53120285A (en) 1977-03-29 1977-03-29 Manufacture of semiconductor

Publications (2)

Publication Number Publication Date
JPS53120285A true JPS53120285A (en) 1978-10-20
JPS5643668B2 JPS5643668B2 (en) 1981-10-14

Family

ID=12453403

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3584877A Granted JPS53120285A (en) 1977-03-29 1977-03-29 Manufacture of semiconductor

Country Status (1)

Country Link
JP (1) JPS53120285A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63197378A (en) * 1987-02-12 1988-08-16 Toshiba Corp Nonvolatile semiconductor storage device and its manufacture

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63197378A (en) * 1987-02-12 1988-08-16 Toshiba Corp Nonvolatile semiconductor storage device and its manufacture

Also Published As

Publication number Publication date
JPS5643668B2 (en) 1981-10-14

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