JPS53120285A - Manufacture of semiconductor - Google Patents
Manufacture of semiconductorInfo
- Publication number
- JPS53120285A JPS53120285A JP3584877A JP3584877A JPS53120285A JP S53120285 A JPS53120285 A JP S53120285A JP 3584877 A JP3584877 A JP 3584877A JP 3584877 A JP3584877 A JP 3584877A JP S53120285 A JPS53120285 A JP S53120285A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- manufacture
- formation
- injecting
- changing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Non-Volatile Memory (AREA)
Abstract
PURPOSE: To secure formation of each region with use of only one sheet of the photo mask by changing the injection energy after formation of the metal mask and then injecting the impurity ion.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3584877A JPS53120285A (en) | 1977-03-29 | 1977-03-29 | Manufacture of semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3584877A JPS53120285A (en) | 1977-03-29 | 1977-03-29 | Manufacture of semiconductor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53120285A true JPS53120285A (en) | 1978-10-20 |
JPS5643668B2 JPS5643668B2 (en) | 1981-10-14 |
Family
ID=12453403
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3584877A Granted JPS53120285A (en) | 1977-03-29 | 1977-03-29 | Manufacture of semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53120285A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63197378A (en) * | 1987-02-12 | 1988-08-16 | Toshiba Corp | Nonvolatile semiconductor storage device and its manufacture |
-
1977
- 1977-03-29 JP JP3584877A patent/JPS53120285A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63197378A (en) * | 1987-02-12 | 1988-08-16 | Toshiba Corp | Nonvolatile semiconductor storage device and its manufacture |
Also Published As
Publication number | Publication date |
---|---|
JPS5643668B2 (en) | 1981-10-14 |
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