JPS53123678A - Manufacture of field effect semiconductor device of insulation gate type - Google Patents
Manufacture of field effect semiconductor device of insulation gate typeInfo
- Publication number
- JPS53123678A JPS53123678A JP3885877A JP3885877A JPS53123678A JP S53123678 A JPS53123678 A JP S53123678A JP 3885877 A JP3885877 A JP 3885877A JP 3885877 A JP3885877 A JP 3885877A JP S53123678 A JPS53123678 A JP S53123678A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- field effect
- gate type
- effect semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To reduce the despersion of characteristics by eliminating a difference in alignment in a photo resist process with the use of a hard-to-oxidize film in a diffusion producess of MOSFET.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3885877A JPS53123678A (en) | 1977-04-04 | 1977-04-04 | Manufacture of field effect semiconductor device of insulation gate type |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3885877A JPS53123678A (en) | 1977-04-04 | 1977-04-04 | Manufacture of field effect semiconductor device of insulation gate type |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53123678A true JPS53123678A (en) | 1978-10-28 |
Family
ID=12536889
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3885877A Pending JPS53123678A (en) | 1977-04-04 | 1977-04-04 | Manufacture of field effect semiconductor device of insulation gate type |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53123678A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55141758A (en) * | 1979-04-23 | 1980-11-05 | Philips Nv | Method of fabricating insulated gate field effect transistor |
JPS5685865A (en) * | 1979-09-18 | 1981-07-13 | Sony Corp | Semiconductor device |
CN112770898A (en) * | 2018-10-05 | 2021-05-07 | 山内株式会社 | Hot-pressing cushioning material and method for manufacturing hot-pressing cushioning material |
-
1977
- 1977-04-04 JP JP3885877A patent/JPS53123678A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55141758A (en) * | 1979-04-23 | 1980-11-05 | Philips Nv | Method of fabricating insulated gate field effect transistor |
JPS5685865A (en) * | 1979-09-18 | 1981-07-13 | Sony Corp | Semiconductor device |
CN112770898A (en) * | 2018-10-05 | 2021-05-07 | 山内株式会社 | Hot-pressing cushioning material and method for manufacturing hot-pressing cushioning material |
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