JPS5357773A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5357773A
JPS5357773A JP13172276A JP13172276A JPS5357773A JP S5357773 A JPS5357773 A JP S5357773A JP 13172276 A JP13172276 A JP 13172276A JP 13172276 A JP13172276 A JP 13172276A JP S5357773 A JPS5357773 A JP S5357773A
Authority
JP
Japan
Prior art keywords
semiconductor device
requiring
ordinary
film thickness
production process
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13172276A
Other languages
Japanese (ja)
Inventor
Hisao Katsuto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13172276A priority Critical patent/JPS5357773A/en
Publication of JPS5357773A publication Critical patent/JPS5357773A/en
Pending legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
  • Semiconductor Integrated Circuits (AREA)

Abstract

PURPOSE: To obtain fine and high-reliability isolation region structure within an ordinary Si gate production process range without requiring any thick film thickness and stepping formation.
COPYRIGHT: (C)1978,JPO&Japio
JP13172276A 1976-11-04 1976-11-04 Semiconductor device Pending JPS5357773A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13172276A JPS5357773A (en) 1976-11-04 1976-11-04 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13172276A JPS5357773A (en) 1976-11-04 1976-11-04 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS5357773A true JPS5357773A (en) 1978-05-25

Family

ID=15064663

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13172276A Pending JPS5357773A (en) 1976-11-04 1976-11-04 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5357773A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5636143A (en) * 1979-08-31 1981-04-09 Hitachi Ltd Manufacture of semiconductor device
JPS57121601A (en) * 1981-01-18 1982-07-29 Mitsuo Shintaku Socks having toe leading part made of rubber knitted cloth
JPS57176743A (en) * 1981-04-24 1982-10-30 Hitachi Ltd Semiconductor integrated circuit device
JPS59188141A (en) * 1984-03-26 1984-10-25 Hitachi Ltd Semiconductor integrated circuit

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5636143A (en) * 1979-08-31 1981-04-09 Hitachi Ltd Manufacture of semiconductor device
JPS57121601A (en) * 1981-01-18 1982-07-29 Mitsuo Shintaku Socks having toe leading part made of rubber knitted cloth
JPS57176743A (en) * 1981-04-24 1982-10-30 Hitachi Ltd Semiconductor integrated circuit device
JPS59188141A (en) * 1984-03-26 1984-10-25 Hitachi Ltd Semiconductor integrated circuit

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