JPS53112686A - Manufacture for semiconductor device - Google Patents
Manufacture for semiconductor deviceInfo
- Publication number
- JPS53112686A JPS53112686A JP2698477A JP2698477A JPS53112686A JP S53112686 A JPS53112686 A JP S53112686A JP 2698477 A JP2698477 A JP 2698477A JP 2698477 A JP2698477 A JP 2698477A JP S53112686 A JPS53112686 A JP S53112686A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- manufacture
- make
- constitution
- oxidation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
Landscapes
- Electrodes Of Semiconductors (AREA)
- Semiconductor Memories (AREA)
Abstract
PURPOSE:To make high density for the semiconductor device of two layer polycrystal Si constitution and to make stable it, by using the SI3N4 film having the mask effect to oxidation and a large dielectric constant for the first gate insulating film.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2698477A JPS53112686A (en) | 1977-03-14 | 1977-03-14 | Manufacture for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2698477A JPS53112686A (en) | 1977-03-14 | 1977-03-14 | Manufacture for semiconductor device |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58050464A Division JPS58175861A (en) | 1983-03-28 | 1983-03-28 | Semiconductor memory unit |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53112686A true JPS53112686A (en) | 1978-10-02 |
JPS6113388B2 JPS6113388B2 (en) | 1986-04-12 |
Family
ID=12208418
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2698477A Granted JPS53112686A (en) | 1977-03-14 | 1977-03-14 | Manufacture for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53112686A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5565458A (en) * | 1978-11-10 | 1980-05-16 | Nec Corp | Memory cell |
JPS57114272A (en) * | 1981-01-06 | 1982-07-16 | Nec Corp | Semiconductor memory |
JPS57186354A (en) * | 1981-05-13 | 1982-11-16 | Hitachi Ltd | Semiconductor memory storage and manufacture thereof |
JPH01152661A (en) * | 1988-06-20 | 1989-06-15 | Hitachi Ltd | Semiconductor memory |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS647615U (en) * | 1987-06-30 | 1989-01-17 |
-
1977
- 1977-03-14 JP JP2698477A patent/JPS53112686A/en active Granted
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5565458A (en) * | 1978-11-10 | 1980-05-16 | Nec Corp | Memory cell |
JPS57114272A (en) * | 1981-01-06 | 1982-07-16 | Nec Corp | Semiconductor memory |
JPS57186354A (en) * | 1981-05-13 | 1982-11-16 | Hitachi Ltd | Semiconductor memory storage and manufacture thereof |
JPH01152661A (en) * | 1988-06-20 | 1989-06-15 | Hitachi Ltd | Semiconductor memory |
JPH0577342B2 (en) * | 1988-06-20 | 1993-10-26 | Hitachi Ltd |
Also Published As
Publication number | Publication date |
---|---|
JPS6113388B2 (en) | 1986-04-12 |
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