JPS53135582A - Semiconductor device and its manufacture - Google Patents

Semiconductor device and its manufacture

Info

Publication number
JPS53135582A
JPS53135582A JP5051977A JP5051977A JPS53135582A JP S53135582 A JPS53135582 A JP S53135582A JP 5051977 A JP5051977 A JP 5051977A JP 5051977 A JP5051977 A JP 5051977A JP S53135582 A JPS53135582 A JP S53135582A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
gate electrode
alignment
self
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5051977A
Other languages
Japanese (ja)
Other versions
JPS5757872B2 (en
Inventor
Kiyobumi Oota
Masanobu Ito
Toshio Usui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP5051977A priority Critical patent/JPS53135582A/en
Publication of JPS53135582A publication Critical patent/JPS53135582A/en
Publication of JPS5757872B2 publication Critical patent/JPS5757872B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To establish fine pattern with excellent accuracy and to increase the high frequency performance, by applying side etching for the formation of a gate electrode and forming the source and drain electrodes with self-alignment with the gate electrode.
COPYRIGHT: (C)1978,JPO&Japio
JP5051977A 1977-04-30 1977-04-30 Semiconductor device and its manufacture Granted JPS53135582A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5051977A JPS53135582A (en) 1977-04-30 1977-04-30 Semiconductor device and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5051977A JPS53135582A (en) 1977-04-30 1977-04-30 Semiconductor device and its manufacture

Publications (2)

Publication Number Publication Date
JPS53135582A true JPS53135582A (en) 1978-11-27
JPS5757872B2 JPS5757872B2 (en) 1982-12-07

Family

ID=12861213

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5051977A Granted JPS53135582A (en) 1977-04-30 1977-04-30 Semiconductor device and its manufacture

Country Status (1)

Country Link
JP (1) JPS53135582A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55110047A (en) * 1979-02-19 1980-08-25 Matsushita Electric Ind Co Ltd Manufacture of gallium arsenide semiconductor device
JPS59126676A (en) * 1983-01-07 1984-07-21 Nec Corp Field effect type transistor
JPH02126628A (en) * 1988-11-07 1990-05-15 Canon Inc Alignment device and its alignment method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55110047A (en) * 1979-02-19 1980-08-25 Matsushita Electric Ind Co Ltd Manufacture of gallium arsenide semiconductor device
JPS59126676A (en) * 1983-01-07 1984-07-21 Nec Corp Field effect type transistor
JPS6323665B2 (en) * 1983-01-07 1988-05-17 Nippon Electric Co
JPH02126628A (en) * 1988-11-07 1990-05-15 Canon Inc Alignment device and its alignment method

Also Published As

Publication number Publication date
JPS5757872B2 (en) 1982-12-07

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