JPS548971A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS548971A JPS548971A JP7463577A JP7463577A JPS548971A JP S548971 A JPS548971 A JP S548971A JP 7463577 A JP7463577 A JP 7463577A JP 7463577 A JP7463577 A JP 7463577A JP S548971 A JPS548971 A JP S548971A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- poly
- impurity
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Bipolar Transistors (AREA)
Abstract
PURPOSE: To work finely impurity-added Si, by etching poly Si using a metal electrode formed on the poly Si as a mask.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7463577A JPS548971A (en) | 1977-06-22 | 1977-06-22 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7463577A JPS548971A (en) | 1977-06-22 | 1977-06-22 | Manufacture of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS548971A true JPS548971A (en) | 1979-01-23 |
JPS6130416B2 JPS6130416B2 (en) | 1986-07-14 |
Family
ID=13552853
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7463577A Granted JPS548971A (en) | 1977-06-22 | 1977-06-22 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS548971A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6089921A (en) * | 1983-10-24 | 1985-05-20 | Rohm Co Ltd | Manufacture of semiconductor device |
US5077236A (en) * | 1990-07-02 | 1991-12-31 | Samsung Electronics Co., Ltd. | Method of making a pattern of tungsten interconnection |
-
1977
- 1977-06-22 JP JP7463577A patent/JPS548971A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6089921A (en) * | 1983-10-24 | 1985-05-20 | Rohm Co Ltd | Manufacture of semiconductor device |
US5077236A (en) * | 1990-07-02 | 1991-12-31 | Samsung Electronics Co., Ltd. | Method of making a pattern of tungsten interconnection |
Also Published As
Publication number | Publication date |
---|---|
JPS6130416B2 (en) | 1986-07-14 |
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