JPS548971A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS548971A
JPS548971A JP7463577A JP7463577A JPS548971A JP S548971 A JPS548971 A JP S548971A JP 7463577 A JP7463577 A JP 7463577A JP 7463577 A JP7463577 A JP 7463577A JP S548971 A JPS548971 A JP S548971A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
poly
impurity
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7463577A
Other languages
Japanese (ja)
Other versions
JPS6130416B2 (en
Inventor
Akira Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP7463577A priority Critical patent/JPS548971A/en
Publication of JPS548971A publication Critical patent/JPS548971A/en
Publication of JPS6130416B2 publication Critical patent/JPS6130416B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Bipolar Transistors (AREA)

Abstract

PURPOSE: To work finely impurity-added Si, by etching poly Si using a metal electrode formed on the poly Si as a mask.
COPYRIGHT: (C)1979,JPO&Japio
JP7463577A 1977-06-22 1977-06-22 Manufacture of semiconductor device Granted JPS548971A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7463577A JPS548971A (en) 1977-06-22 1977-06-22 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7463577A JPS548971A (en) 1977-06-22 1977-06-22 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS548971A true JPS548971A (en) 1979-01-23
JPS6130416B2 JPS6130416B2 (en) 1986-07-14

Family

ID=13552853

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7463577A Granted JPS548971A (en) 1977-06-22 1977-06-22 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS548971A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6089921A (en) * 1983-10-24 1985-05-20 Rohm Co Ltd Manufacture of semiconductor device
US5077236A (en) * 1990-07-02 1991-12-31 Samsung Electronics Co., Ltd. Method of making a pattern of tungsten interconnection

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6089921A (en) * 1983-10-24 1985-05-20 Rohm Co Ltd Manufacture of semiconductor device
US5077236A (en) * 1990-07-02 1991-12-31 Samsung Electronics Co., Ltd. Method of making a pattern of tungsten interconnection

Also Published As

Publication number Publication date
JPS6130416B2 (en) 1986-07-14

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