JPS5227275A - Glass mask holder - Google Patents
Glass mask holderInfo
- Publication number
- JPS5227275A JPS5227275A JP10327075A JP10327075A JPS5227275A JP S5227275 A JPS5227275 A JP S5227275A JP 10327075 A JP10327075 A JP 10327075A JP 10327075 A JP10327075 A JP 10327075A JP S5227275 A JPS5227275 A JP S5227275A
- Authority
- JP
- Japan
- Prior art keywords
- glass mask
- mask holder
- holder
- glass
- deformathus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To provide steps inaa holder for the prevention of glass mask deformathus enabling fine patterning.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10327075A JPS5227275A (en) | 1975-08-26 | 1975-08-26 | Glass mask holder |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10327075A JPS5227275A (en) | 1975-08-26 | 1975-08-26 | Glass mask holder |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5227275A true JPS5227275A (en) | 1977-03-01 |
Family
ID=14349705
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10327075A Pending JPS5227275A (en) | 1975-08-26 | 1975-08-26 | Glass mask holder |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5227275A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5591124A (en) * | 1978-12-27 | 1980-07-10 | Nec Kyushu Ltd | Alignment matching exposure apparatus |
-
1975
- 1975-08-26 JP JP10327075A patent/JPS5227275A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5591124A (en) * | 1978-12-27 | 1980-07-10 | Nec Kyushu Ltd | Alignment matching exposure apparatus |
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