JPS5227275A - Glass mask holder - Google Patents

Glass mask holder

Info

Publication number
JPS5227275A
JPS5227275A JP10327075A JP10327075A JPS5227275A JP S5227275 A JPS5227275 A JP S5227275A JP 10327075 A JP10327075 A JP 10327075A JP 10327075 A JP10327075 A JP 10327075A JP S5227275 A JPS5227275 A JP S5227275A
Authority
JP
Japan
Prior art keywords
glass mask
mask holder
holder
glass
deformathus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10327075A
Other languages
Japanese (ja)
Inventor
Tsugumitsu Miyasaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP10327075A priority Critical patent/JPS5227275A/en
Publication of JPS5227275A publication Critical patent/JPS5227275A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To provide steps inaa holder for the prevention of glass mask deformathus enabling fine patterning.
COPYRIGHT: (C)1977,JPO&Japio
JP10327075A 1975-08-26 1975-08-26 Glass mask holder Pending JPS5227275A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10327075A JPS5227275A (en) 1975-08-26 1975-08-26 Glass mask holder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10327075A JPS5227275A (en) 1975-08-26 1975-08-26 Glass mask holder

Publications (1)

Publication Number Publication Date
JPS5227275A true JPS5227275A (en) 1977-03-01

Family

ID=14349705

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10327075A Pending JPS5227275A (en) 1975-08-26 1975-08-26 Glass mask holder

Country Status (1)

Country Link
JP (1) JPS5227275A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5591124A (en) * 1978-12-27 1980-07-10 Nec Kyushu Ltd Alignment matching exposure apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5591124A (en) * 1978-12-27 1980-07-10 Nec Kyushu Ltd Alignment matching exposure apparatus

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