JPS51151073A - Method to adjust the position of an mask for an integrated circuit - Google Patents

Method to adjust the position of an mask for an integrated circuit

Info

Publication number
JPS51151073A
JPS51151073A JP50075913A JP7591375A JPS51151073A JP S51151073 A JPS51151073 A JP S51151073A JP 50075913 A JP50075913 A JP 50075913A JP 7591375 A JP7591375 A JP 7591375A JP S51151073 A JPS51151073 A JP S51151073A
Authority
JP
Japan
Prior art keywords
mask
adjust
integrated circuit
alignment key
make easy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50075913A
Other languages
Japanese (ja)
Other versions
JPS5922370B2 (en
Inventor
Toshio Sugawa
Kazuhiko Tsuji
Takashi Hirao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50075913A priority Critical patent/JPS5922370B2/en
Publication of JPS51151073A publication Critical patent/JPS51151073A/en
Publication of JPS5922370B2 publication Critical patent/JPS5922370B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To make easy to adjust the position of an mask for an integrated circuit, by using the mask set the alignment key.
COPYRIGHT: (C)1976,JPO&Japio
JP50075913A 1975-06-20 1975-06-20 How to align masks for integrated circuits Expired JPS5922370B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50075913A JPS5922370B2 (en) 1975-06-20 1975-06-20 How to align masks for integrated circuits

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50075913A JPS5922370B2 (en) 1975-06-20 1975-06-20 How to align masks for integrated circuits

Publications (2)

Publication Number Publication Date
JPS51151073A true JPS51151073A (en) 1976-12-25
JPS5922370B2 JPS5922370B2 (en) 1984-05-26

Family

ID=13590031

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50075913A Expired JPS5922370B2 (en) 1975-06-20 1975-06-20 How to align masks for integrated circuits

Country Status (1)

Country Link
JP (1) JPS5922370B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5794941U (en) * 1980-12-02 1982-06-11
JPS62271426A (en) * 1986-05-20 1987-11-25 Matsushita Electric Ind Co Ltd Alignment of mask position
JPS62271427A (en) * 1986-05-20 1987-11-25 Matsushita Electric Ind Co Ltd Aligment of mask position
KR101250786B1 (en) 2006-06-30 2013-04-04 엘지디스플레이 주식회사 Method of scan operating in semiconductor equipment

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5147028A (en) * 1974-10-21 1976-04-22 Fukuda Metal Foil Powder DODENSEITORYO

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5147028A (en) * 1974-10-21 1976-04-22 Fukuda Metal Foil Powder DODENSEITORYO

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5794941U (en) * 1980-12-02 1982-06-11
JPS622764Y2 (en) * 1980-12-02 1987-01-22
JPS62271426A (en) * 1986-05-20 1987-11-25 Matsushita Electric Ind Co Ltd Alignment of mask position
JPS62271427A (en) * 1986-05-20 1987-11-25 Matsushita Electric Ind Co Ltd Aligment of mask position
KR101250786B1 (en) 2006-06-30 2013-04-04 엘지디스플레이 주식회사 Method of scan operating in semiconductor equipment

Also Published As

Publication number Publication date
JPS5922370B2 (en) 1984-05-26

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