JPS51151073A - Method to adjust the position of an mask for an integrated circuit - Google Patents
Method to adjust the position of an mask for an integrated circuitInfo
- Publication number
- JPS51151073A JPS51151073A JP50075913A JP7591375A JPS51151073A JP S51151073 A JPS51151073 A JP S51151073A JP 50075913 A JP50075913 A JP 50075913A JP 7591375 A JP7591375 A JP 7591375A JP S51151073 A JPS51151073 A JP S51151073A
- Authority
- JP
- Japan
- Prior art keywords
- mask
- adjust
- integrated circuit
- alignment key
- make easy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE: To make easy to adjust the position of an mask for an integrated circuit, by using the mask set the alignment key.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50075913A JPS5922370B2 (en) | 1975-06-20 | 1975-06-20 | How to align masks for integrated circuits |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50075913A JPS5922370B2 (en) | 1975-06-20 | 1975-06-20 | How to align masks for integrated circuits |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51151073A true JPS51151073A (en) | 1976-12-25 |
JPS5922370B2 JPS5922370B2 (en) | 1984-05-26 |
Family
ID=13590031
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50075913A Expired JPS5922370B2 (en) | 1975-06-20 | 1975-06-20 | How to align masks for integrated circuits |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5922370B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5794941U (en) * | 1980-12-02 | 1982-06-11 | ||
JPS62271426A (en) * | 1986-05-20 | 1987-11-25 | Matsushita Electric Ind Co Ltd | Alignment of mask position |
JPS62271427A (en) * | 1986-05-20 | 1987-11-25 | Matsushita Electric Ind Co Ltd | Aligment of mask position |
KR101250786B1 (en) | 2006-06-30 | 2013-04-04 | 엘지디스플레이 주식회사 | Method of scan operating in semiconductor equipment |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5147028A (en) * | 1974-10-21 | 1976-04-22 | Fukuda Metal Foil Powder | DODENSEITORYO |
-
1975
- 1975-06-20 JP JP50075913A patent/JPS5922370B2/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5147028A (en) * | 1974-10-21 | 1976-04-22 | Fukuda Metal Foil Powder | DODENSEITORYO |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5794941U (en) * | 1980-12-02 | 1982-06-11 | ||
JPS622764Y2 (en) * | 1980-12-02 | 1987-01-22 | ||
JPS62271426A (en) * | 1986-05-20 | 1987-11-25 | Matsushita Electric Ind Co Ltd | Alignment of mask position |
JPS62271427A (en) * | 1986-05-20 | 1987-11-25 | Matsushita Electric Ind Co Ltd | Aligment of mask position |
KR101250786B1 (en) | 2006-06-30 | 2013-04-04 | 엘지디스플레이 주식회사 | Method of scan operating in semiconductor equipment |
Also Published As
Publication number | Publication date |
---|---|
JPS5922370B2 (en) | 1984-05-26 |
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