JPS5228875A - Mask - Google Patents
MaskInfo
- Publication number
- JPS5228875A JPS5228875A JP50104116A JP10411675A JPS5228875A JP S5228875 A JPS5228875 A JP S5228875A JP 50104116 A JP50104116 A JP 50104116A JP 10411675 A JP10411675 A JP 10411675A JP S5228875 A JPS5228875 A JP S5228875A
- Authority
- JP
- Japan
- Prior art keywords
- mask
- adhering
- couple
- degradation
- mark
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B02—CRUSHING, PULVERISING, OR DISINTEGRATING; PREPARATORY TREATMENT OF GRAIN FOR MILLING
- B02C—CRUSHING, PULVERISING, OR DISINTEGRATING IN GENERAL; MILLING GRAIN
- B02C15/00—Disintegrating by milling members in the form of rollers or balls co-operating with rings or discs
- B02C15/006—Ring or disc drive gear arrangement
Landscapes
- Engineering & Computer Science (AREA)
- Food Science & Technology (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Crushing And Grinding (AREA)
Abstract
PURPOSE: To couple the mask without degradation of precision by adhering the filter of the ultraviolet rays to back surface corresponding to the position of the mark on the mask plate.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50104116A JPS5228875A (en) | 1975-07-29 | 1975-07-29 | Mask |
DE19767620223 DE7620223U1 (en) | 1975-07-29 | 1976-06-25 | PULVERIZING DEVICE |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50104116A JPS5228875A (en) | 1975-07-29 | 1975-07-29 | Mask |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5228875A true JPS5228875A (en) | 1977-03-04 |
JPS5412387B2 JPS5412387B2 (en) | 1979-05-22 |
Family
ID=14372141
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50104116A Granted JPS5228875A (en) | 1975-07-29 | 1975-07-29 | Mask |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPS5228875A (en) |
DE (1) | DE7620223U1 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61187343A (en) * | 1985-02-15 | 1986-08-21 | Nec Corp | Semiconductor substrate |
JPH0474988U (en) * | 1990-11-14 | 1992-06-30 | ||
JP2013054072A (en) * | 2011-08-31 | 2013-03-21 | Fujitsu Semiconductor Ltd | Exposure mask, pellicle, and method of manufacturing semiconductor device |
JP2014520668A (en) * | 2011-07-21 | 2014-08-25 | レンク・アクティエンゲゼルシャフト | Drive unit for vertical roller mill |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3931116C2 (en) * | 1989-09-18 | 1994-02-03 | Krupp Polysius Ag | Drive device for a roller mill |
DE102006050205B4 (en) * | 2006-10-25 | 2013-03-21 | Gebr. Pfeiffer Ag | Safety system for roller mill |
DE102007006092A1 (en) | 2007-02-07 | 2008-08-14 | Polysius Ag | Process for comminuting regrind with a roller mill |
DE202007010730U1 (en) * | 2007-08-02 | 2008-12-11 | Loesche Gmbh | Mill gearbox for roller mill |
DE102008015141A1 (en) * | 2008-03-20 | 2009-11-05 | Gebr. Pfeiffer Ag | roller mill |
FR2979838B1 (en) * | 2011-09-09 | 2016-01-15 | Cie Engrenages Et Reducteurs Messian Durand | VERTICAL MILL DRIVE WITH SEVERAL MAIN DRIVINGS |
DE102014008966A1 (en) * | 2014-06-23 | 2015-12-24 | Renk Aktiengesellschaft | Drive arrangement for a vertical roller mill |
-
1975
- 1975-07-29 JP JP50104116A patent/JPS5228875A/en active Granted
-
1976
- 1976-06-25 DE DE19767620223 patent/DE7620223U1/en not_active Expired
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61187343A (en) * | 1985-02-15 | 1986-08-21 | Nec Corp | Semiconductor substrate |
JPH0474988U (en) * | 1990-11-14 | 1992-06-30 | ||
JP2014520668A (en) * | 2011-07-21 | 2014-08-25 | レンク・アクティエンゲゼルシャフト | Drive unit for vertical roller mill |
JP2013054072A (en) * | 2011-08-31 | 2013-03-21 | Fujitsu Semiconductor Ltd | Exposure mask, pellicle, and method of manufacturing semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
DE7620223U1 (en) | 1976-12-09 |
JPS5412387B2 (en) | 1979-05-22 |
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