JPS5228875A - Mask - Google Patents

Mask

Info

Publication number
JPS5228875A
JPS5228875A JP50104116A JP10411675A JPS5228875A JP S5228875 A JPS5228875 A JP S5228875A JP 50104116 A JP50104116 A JP 50104116A JP 10411675 A JP10411675 A JP 10411675A JP S5228875 A JPS5228875 A JP S5228875A
Authority
JP
Japan
Prior art keywords
mask
adhering
couple
degradation
mark
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50104116A
Other languages
Japanese (ja)
Other versions
JPS5412387B2 (en
Inventor
Nobuya Shinoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Nippon Chemical Industrial Co Ltd
Original Assignee
Nippon Chemical Industrial Co Ltd
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Chemical Industrial Co Ltd, Nippon Kogaku KK filed Critical Nippon Chemical Industrial Co Ltd
Priority to JP50104116A priority Critical patent/JPS5228875A/en
Priority to DE19767620223 priority patent/DE7620223U1/en
Publication of JPS5228875A publication Critical patent/JPS5228875A/en
Publication of JPS5412387B2 publication Critical patent/JPS5412387B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B02—CRUSHING, PULVERISING, OR DISINTEGRATING; PREPARATORY TREATMENT OF GRAIN FOR MILLING
    • B02C—CRUSHING, PULVERISING, OR DISINTEGRATING IN GENERAL; MILLING GRAIN
    • B02C15/00—Disintegrating by milling members in the form of rollers or balls co-operating with rings or discs
    • B02C15/006—Ring or disc drive gear arrangement

Landscapes

  • Engineering & Computer Science (AREA)
  • Food Science & Technology (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Crushing And Grinding (AREA)

Abstract

PURPOSE: To couple the mask without degradation of precision by adhering the filter of the ultraviolet rays to back surface corresponding to the position of the mark on the mask plate.
COPYRIGHT: (C)1977,JPO&Japio
JP50104116A 1975-07-29 1975-07-29 Mask Granted JPS5228875A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP50104116A JPS5228875A (en) 1975-07-29 1975-07-29 Mask
DE19767620223 DE7620223U1 (en) 1975-07-29 1976-06-25 PULVERIZING DEVICE

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50104116A JPS5228875A (en) 1975-07-29 1975-07-29 Mask

Publications (2)

Publication Number Publication Date
JPS5228875A true JPS5228875A (en) 1977-03-04
JPS5412387B2 JPS5412387B2 (en) 1979-05-22

Family

ID=14372141

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50104116A Granted JPS5228875A (en) 1975-07-29 1975-07-29 Mask

Country Status (2)

Country Link
JP (1) JPS5228875A (en)
DE (1) DE7620223U1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61187343A (en) * 1985-02-15 1986-08-21 Nec Corp Semiconductor substrate
JPH0474988U (en) * 1990-11-14 1992-06-30
JP2013054072A (en) * 2011-08-31 2013-03-21 Fujitsu Semiconductor Ltd Exposure mask, pellicle, and method of manufacturing semiconductor device
JP2014520668A (en) * 2011-07-21 2014-08-25 レンク・アクティエンゲゼルシャフト Drive unit for vertical roller mill

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3931116C2 (en) * 1989-09-18 1994-02-03 Krupp Polysius Ag Drive device for a roller mill
DE102006050205B4 (en) * 2006-10-25 2013-03-21 Gebr. Pfeiffer Ag Safety system for roller mill
DE102007006092A1 (en) 2007-02-07 2008-08-14 Polysius Ag Process for comminuting regrind with a roller mill
DE202007010730U1 (en) * 2007-08-02 2008-12-11 Loesche Gmbh Mill gearbox for roller mill
DE102008015141A1 (en) * 2008-03-20 2009-11-05 Gebr. Pfeiffer Ag roller mill
FR2979838B1 (en) * 2011-09-09 2016-01-15 Cie Engrenages Et Reducteurs Messian Durand VERTICAL MILL DRIVE WITH SEVERAL MAIN DRIVINGS
DE102014008966A1 (en) * 2014-06-23 2015-12-24 Renk Aktiengesellschaft Drive arrangement for a vertical roller mill

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61187343A (en) * 1985-02-15 1986-08-21 Nec Corp Semiconductor substrate
JPH0474988U (en) * 1990-11-14 1992-06-30
JP2014520668A (en) * 2011-07-21 2014-08-25 レンク・アクティエンゲゼルシャフト Drive unit for vertical roller mill
JP2013054072A (en) * 2011-08-31 2013-03-21 Fujitsu Semiconductor Ltd Exposure mask, pellicle, and method of manufacturing semiconductor device

Also Published As

Publication number Publication date
DE7620223U1 (en) 1976-12-09
JPS5412387B2 (en) 1979-05-22

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