JPS5216171A - Mask fitting device - Google Patents

Mask fitting device

Info

Publication number
JPS5216171A
JPS5216171A JP50091876A JP9187675A JPS5216171A JP S5216171 A JPS5216171 A JP S5216171A JP 50091876 A JP50091876 A JP 50091876A JP 9187675 A JP9187675 A JP 9187675A JP S5216171 A JPS5216171 A JP S5216171A
Authority
JP
Japan
Prior art keywords
fitting device
mask fitting
mask
parallelism
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50091876A
Other languages
Japanese (ja)
Inventor
Kiyotake Naraoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50091876A priority Critical patent/JPS5216171A/en
Publication of JPS5216171A publication Critical patent/JPS5216171A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: The mask fitting device by which sufficient adherence and parallelism between the metal mask and the wafer are obtained.
COPYRIGHT: (C)1977,JPO&Japio
JP50091876A 1975-07-30 1975-07-30 Mask fitting device Pending JPS5216171A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50091876A JPS5216171A (en) 1975-07-30 1975-07-30 Mask fitting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50091876A JPS5216171A (en) 1975-07-30 1975-07-30 Mask fitting device

Publications (1)

Publication Number Publication Date
JPS5216171A true JPS5216171A (en) 1977-02-07

Family

ID=14038750

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50091876A Pending JPS5216171A (en) 1975-07-30 1975-07-30 Mask fitting device

Country Status (1)

Country Link
JP (1) JPS5216171A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53113178U (en) * 1977-02-15 1978-09-08
JPS54128681A (en) * 1978-03-29 1979-10-05 Kyushu Nippon Electric Semiconductor substrate supporting stand for vision exposure device
JPH04130883U (en) * 1991-05-27 1992-12-01 株式会社村田製作所 Printing mask device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53113178U (en) * 1977-02-15 1978-09-08
JPS5736927Y2 (en) * 1977-02-15 1982-08-14
JPS54128681A (en) * 1978-03-29 1979-10-05 Kyushu Nippon Electric Semiconductor substrate supporting stand for vision exposure device
JPH04130883U (en) * 1991-05-27 1992-12-01 株式会社村田製作所 Printing mask device

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