JPS5216171A - Mask fitting device - Google Patents
Mask fitting deviceInfo
- Publication number
- JPS5216171A JPS5216171A JP50091876A JP9187675A JPS5216171A JP S5216171 A JPS5216171 A JP S5216171A JP 50091876 A JP50091876 A JP 50091876A JP 9187675 A JP9187675 A JP 9187675A JP S5216171 A JPS5216171 A JP S5216171A
- Authority
- JP
- Japan
- Prior art keywords
- fitting device
- mask fitting
- mask
- parallelism
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
PURPOSE: The mask fitting device by which sufficient adherence and parallelism between the metal mask and the wafer are obtained.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50091876A JPS5216171A (en) | 1975-07-30 | 1975-07-30 | Mask fitting device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50091876A JPS5216171A (en) | 1975-07-30 | 1975-07-30 | Mask fitting device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5216171A true JPS5216171A (en) | 1977-02-07 |
Family
ID=14038750
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50091876A Pending JPS5216171A (en) | 1975-07-30 | 1975-07-30 | Mask fitting device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5216171A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53113178U (en) * | 1977-02-15 | 1978-09-08 | ||
JPS54128681A (en) * | 1978-03-29 | 1979-10-05 | Kyushu Nippon Electric | Semiconductor substrate supporting stand for vision exposure device |
JPH04130883U (en) * | 1991-05-27 | 1992-12-01 | 株式会社村田製作所 | Printing mask device |
-
1975
- 1975-07-30 JP JP50091876A patent/JPS5216171A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53113178U (en) * | 1977-02-15 | 1978-09-08 | ||
JPS5736927Y2 (en) * | 1977-02-15 | 1982-08-14 | ||
JPS54128681A (en) * | 1978-03-29 | 1979-10-05 | Kyushu Nippon Electric | Semiconductor substrate supporting stand for vision exposure device |
JPH04130883U (en) * | 1991-05-27 | 1992-12-01 | 株式会社村田製作所 | Printing mask device |
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