JPS5216171A - Mask fitting device - Google Patents

Mask fitting device

Info

Publication number
JPS5216171A
JPS5216171A JP50091876A JP9187675A JPS5216171A JP S5216171 A JPS5216171 A JP S5216171A JP 50091876 A JP50091876 A JP 50091876A JP 9187675 A JP9187675 A JP 9187675A JP S5216171 A JPS5216171 A JP S5216171A
Authority
JP
Japan
Prior art keywords
fitting device
mask fitting
mask
parallelism
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50091876A
Other languages
Japanese (ja)
Inventor
Kiyotake Naraoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50091876A priority Critical patent/JPS5216171A/en
Publication of JPS5216171A publication Critical patent/JPS5216171A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: The mask fitting device by which sufficient adherence and parallelism between the metal mask and the wafer are obtained.
COPYRIGHT: (C)1977,JPO&Japio
JP50091876A 1975-07-30 1975-07-30 Mask fitting device Pending JPS5216171A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50091876A JPS5216171A (en) 1975-07-30 1975-07-30 Mask fitting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50091876A JPS5216171A (en) 1975-07-30 1975-07-30 Mask fitting device

Publications (1)

Publication Number Publication Date
JPS5216171A true JPS5216171A (en) 1977-02-07

Family

ID=14038750

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50091876A Pending JPS5216171A (en) 1975-07-30 1975-07-30 Mask fitting device

Country Status (1)

Country Link
JP (1) JPS5216171A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53113178U (en) * 1977-02-15 1978-09-08
JPS54128681A (en) * 1978-03-29 1979-10-05 Kyushu Nippon Electric Semiconductor substrate supporting stand for vision exposure device
JPH04130883U (en) * 1991-05-27 1992-12-01 株式会社村田製作所 Printing mask device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53113178U (en) * 1977-02-15 1978-09-08
JPS5736927Y2 (en) * 1977-02-15 1982-08-14
JPS54128681A (en) * 1978-03-29 1979-10-05 Kyushu Nippon Electric Semiconductor substrate supporting stand for vision exposure device
JPH04130883U (en) * 1991-05-27 1992-12-01 株式会社村田製作所 Printing mask device

Similar Documents

Publication Publication Date Title
JPS51111076A (en) Exposure device
JPS53105477A (en) 7-glycylprolylamono-4-methylcoumarine
JPS51136208A (en) Voice recognition device for limited words
JPS5216171A (en) Mask fitting device
JPS521851A (en) Travelling apparatus
JPS5219070A (en) Distribution method
JPS52144656A (en) N-(diphenylphosphonomethyl)-imino-diacetonitrile and its preparation
JPS51135465A (en) Semi-conductor unit
JPS527595A (en) Apparatus for positioning transweb member for bent outer plate or the like
JPS51113423A (en) Pattern input device
JPS5221319A (en) Slime controlling agent
JPS5227280A (en) Method to form pinholes
JPS524971A (en) Anti-skid brake device
JPS51113422A (en) Zero mask system
JPS5286071A (en) Metallic mask
JPS537672A (en) 4-aminomethyl-5,6,7-trihydroxyisocoumarin
JPS51135473A (en) Surface treatment agent of semi- conductor elements
JPS5225965A (en) Sealing screw
JPS51122819A (en) Mist eliminator
JPS5217093A (en) Coin discriminator
JPS5315326A (en) N,n,n',n'-tetraglycidyltolylenediamine
JPS526461A (en) Magnetic field type electron lens
JPS5224745A (en) Flying object
JPS51120649A (en) Analog accumulation circuit
JPS52153906A (en) 1-hexadecyne-6-one and its preparation