JPS5219070A - Distribution method - Google Patents

Distribution method

Info

Publication number
JPS5219070A
JPS5219070A JP9515575A JP9515575A JPS5219070A JP S5219070 A JPS5219070 A JP S5219070A JP 9515575 A JP9515575 A JP 9515575A JP 9515575 A JP9515575 A JP 9515575A JP S5219070 A JPS5219070 A JP S5219070A
Authority
JP
Japan
Prior art keywords
distribution method
etching
spacer
reducing
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9515575A
Other languages
Japanese (ja)
Inventor
Makoto Nakase
Hiroshi Kinoshita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP9515575A priority Critical patent/JPS5219070A/en
Publication of JPS5219070A publication Critical patent/JPS5219070A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: A distribution method which makes the ultra fine aluminum patterning possible by means of reducing the side etching quantity thereby performing the etching of spacer-layer.
COPYRIGHT: (C)1977,JPO&Japio
JP9515575A 1975-08-05 1975-08-05 Distribution method Pending JPS5219070A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9515575A JPS5219070A (en) 1975-08-05 1975-08-05 Distribution method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9515575A JPS5219070A (en) 1975-08-05 1975-08-05 Distribution method

Publications (1)

Publication Number Publication Date
JPS5219070A true JPS5219070A (en) 1977-01-14

Family

ID=14129887

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9515575A Pending JPS5219070A (en) 1975-08-05 1975-08-05 Distribution method

Country Status (1)

Country Link
JP (1) JPS5219070A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55125627A (en) * 1979-03-22 1980-09-27 Hitachi Ltd Formation of electrode for semiconductor device
JPS55134932A (en) * 1979-04-10 1980-10-21 Toshiba Corp Preparation of semiconductor device
JPS56105632A (en) * 1980-01-28 1981-08-22 Mitsubishi Electric Corp Manufacture of semiconductor device
JPS57169258A (en) * 1981-04-10 1982-10-18 Oki Electric Ind Co Ltd Manufacture of semiconductor device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55125627A (en) * 1979-03-22 1980-09-27 Hitachi Ltd Formation of electrode for semiconductor device
JPS55134932A (en) * 1979-04-10 1980-10-21 Toshiba Corp Preparation of semiconductor device
JPS56105632A (en) * 1980-01-28 1981-08-22 Mitsubishi Electric Corp Manufacture of semiconductor device
JPS57169258A (en) * 1981-04-10 1982-10-18 Oki Electric Ind Co Ltd Manufacture of semiconductor device

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