JPS51126073A - Pattern printing equpment made available by photo-etching method - Google Patents

Pattern printing equpment made available by photo-etching method

Info

Publication number
JPS51126073A
JPS51126073A JP50049691A JP4969175A JPS51126073A JP S51126073 A JPS51126073 A JP S51126073A JP 50049691 A JP50049691 A JP 50049691A JP 4969175 A JP4969175 A JP 4969175A JP S51126073 A JPS51126073 A JP S51126073A
Authority
JP
Japan
Prior art keywords
photo
equpment
pattern printing
made available
etching method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50049691A
Other languages
Japanese (ja)
Inventor
Seiji Iio
Hiroshi Nishizuka
Mutsuyo Kanetani
Yoji Yabuhara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50049691A priority Critical patent/JPS51126073A/en
Publication of JPS51126073A publication Critical patent/JPS51126073A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain pattern printing equipment by photo engraving being able to establish the exposure at high definition.
COPYRIGHT: (C)1976,JPO&Japio
JP50049691A 1975-04-25 1975-04-25 Pattern printing equpment made available by photo-etching method Pending JPS51126073A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50049691A JPS51126073A (en) 1975-04-25 1975-04-25 Pattern printing equpment made available by photo-etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50049691A JPS51126073A (en) 1975-04-25 1975-04-25 Pattern printing equpment made available by photo-etching method

Publications (1)

Publication Number Publication Date
JPS51126073A true JPS51126073A (en) 1976-11-02

Family

ID=12838195

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50049691A Pending JPS51126073A (en) 1975-04-25 1975-04-25 Pattern printing equpment made available by photo-etching method

Country Status (1)

Country Link
JP (1) JPS51126073A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55147633A (en) * 1979-05-07 1980-11-17 Dainippon Printing Co Ltd Exposure controlling method for well-lighted room type automatic printer
JPS55181509U (en) * 1979-06-14 1980-12-26
JPS57117238A (en) * 1981-01-14 1982-07-21 Nippon Kogaku Kk <Nikon> Exposing and baking device for manufacturing integrated circuit with illuminometer
JPS6172219A (en) * 1984-09-15 1986-04-14 Canon Inc Exposure device
JPS62104123A (en) * 1985-10-31 1987-05-14 Canon Inc Exposing apparatus
JPS63138732A (en) * 1986-12-01 1988-06-10 Canon Inc Exposure system

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55147633A (en) * 1979-05-07 1980-11-17 Dainippon Printing Co Ltd Exposure controlling method for well-lighted room type automatic printer
JPH0231377B2 (en) * 1979-05-07 1990-07-12 Dainippon Insatsu Kk
JPS55181509U (en) * 1979-06-14 1980-12-26
JPS57117238A (en) * 1981-01-14 1982-07-21 Nippon Kogaku Kk <Nikon> Exposing and baking device for manufacturing integrated circuit with illuminometer
JPH0139207B2 (en) * 1981-01-14 1989-08-18 Nikon Kk
JPS6172219A (en) * 1984-09-15 1986-04-14 Canon Inc Exposure device
JPH0347569B2 (en) * 1984-09-15 1991-07-19 Canon Kk
JPS62104123A (en) * 1985-10-31 1987-05-14 Canon Inc Exposing apparatus
JPS63138732A (en) * 1986-12-01 1988-06-10 Canon Inc Exposure system

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