JPS5357973A - Preparation of photo mask - Google Patents

Preparation of photo mask

Info

Publication number
JPS5357973A
JPS5357973A JP13356976A JP13356976A JPS5357973A JP S5357973 A JPS5357973 A JP S5357973A JP 13356976 A JP13356976 A JP 13356976A JP 13356976 A JP13356976 A JP 13356976A JP S5357973 A JPS5357973 A JP S5357973A
Authority
JP
Japan
Prior art keywords
preparation
photo mask
hiterto
turnabout
detrimental
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13356976A
Other languages
Japanese (ja)
Inventor
Teruhiko Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP13356976A priority Critical patent/JPS5357973A/en
Publication of JPS5357973A publication Critical patent/JPS5357973A/en
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: To form metal photo masks of fine patterns without using an electron exposure apparatus or the like by making use on the contrary of the turnabout of radiation light which has hiterto been a detrimental cause.
COPYRIGHT: (C)1978,JPO&Japio
JP13356976A 1976-11-05 1976-11-05 Preparation of photo mask Pending JPS5357973A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13356976A JPS5357973A (en) 1976-11-05 1976-11-05 Preparation of photo mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13356976A JPS5357973A (en) 1976-11-05 1976-11-05 Preparation of photo mask

Publications (1)

Publication Number Publication Date
JPS5357973A true JPS5357973A (en) 1978-05-25

Family

ID=15107864

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13356976A Pending JPS5357973A (en) 1976-11-05 1976-11-05 Preparation of photo mask

Country Status (1)

Country Link
JP (1) JPS5357973A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS557799A (en) * 1978-06-29 1980-01-19 Siemens Ag Production of precise*flat molded parts
JPS5848055A (en) * 1981-09-17 1983-03-19 Mizuho Shoji Kk Production of original plate for engraver

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS557799A (en) * 1978-06-29 1980-01-19 Siemens Ag Production of precise*flat molded parts
JPH0232619B2 (en) * 1978-06-29 1990-07-23 Siemens Ag
JPS5848055A (en) * 1981-09-17 1983-03-19 Mizuho Shoji Kk Production of original plate for engraver

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