JPS52152171A - Wafer alignment method - Google Patents

Wafer alignment method

Info

Publication number
JPS52152171A
JPS52152171A JP6881676A JP6881676A JPS52152171A JP S52152171 A JPS52152171 A JP S52152171A JP 6881676 A JP6881676 A JP 6881676A JP 6881676 A JP6881676 A JP 6881676A JP S52152171 A JPS52152171 A JP S52152171A
Authority
JP
Japan
Prior art keywords
alignment method
wafer alignment
wafer
contrast
straight line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6881676A
Other languages
Japanese (ja)
Inventor
Masatake Kishino
Shigeru Aoki
Michiyoshi Maki
Koji Honma
Keijiro Uehara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6881676A priority Critical patent/JPS52152171A/en
Publication of JPS52152171A publication Critical patent/JPS52152171A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To improve the contrast of moire patterns and perform mask alignment effectively by providing straight line or curve groups of effective widths on a wafer and photo mask.
COPYRIGHT: (C)1977,JPO&Japio
JP6881676A 1976-06-14 1976-06-14 Wafer alignment method Pending JPS52152171A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6881676A JPS52152171A (en) 1976-06-14 1976-06-14 Wafer alignment method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6881676A JPS52152171A (en) 1976-06-14 1976-06-14 Wafer alignment method

Publications (1)

Publication Number Publication Date
JPS52152171A true JPS52152171A (en) 1977-12-17

Family

ID=13384605

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6881676A Pending JPS52152171A (en) 1976-06-14 1976-06-14 Wafer alignment method

Country Status (1)

Country Link
JP (1) JPS52152171A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60201628A (en) * 1984-03-26 1985-10-12 Sharp Corp Production of semiconductor integrated circuit
JPS61187343A (en) * 1985-02-15 1986-08-21 Nec Corp Semiconductor substrate

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60201628A (en) * 1984-03-26 1985-10-12 Sharp Corp Production of semiconductor integrated circuit
JPH0141247B2 (en) * 1984-03-26 1989-09-04 Sharp Kk
JPS61187343A (en) * 1985-02-15 1986-08-21 Nec Corp Semiconductor substrate

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