JPS52152171A - Wafer alignment method - Google Patents
Wafer alignment methodInfo
- Publication number
- JPS52152171A JPS52152171A JP6881676A JP6881676A JPS52152171A JP S52152171 A JPS52152171 A JP S52152171A JP 6881676 A JP6881676 A JP 6881676A JP 6881676 A JP6881676 A JP 6881676A JP S52152171 A JPS52152171 A JP S52152171A
- Authority
- JP
- Japan
- Prior art keywords
- alignment method
- wafer alignment
- wafer
- contrast
- straight line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To improve the contrast of moire patterns and perform mask alignment effectively by providing straight line or curve groups of effective widths on a wafer and photo mask.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6881676A JPS52152171A (en) | 1976-06-14 | 1976-06-14 | Wafer alignment method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6881676A JPS52152171A (en) | 1976-06-14 | 1976-06-14 | Wafer alignment method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52152171A true JPS52152171A (en) | 1977-12-17 |
Family
ID=13384605
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6881676A Pending JPS52152171A (en) | 1976-06-14 | 1976-06-14 | Wafer alignment method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52152171A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60201628A (en) * | 1984-03-26 | 1985-10-12 | Sharp Corp | Production of semiconductor integrated circuit |
JPS61187343A (en) * | 1985-02-15 | 1986-08-21 | Nec Corp | Semiconductor substrate |
-
1976
- 1976-06-14 JP JP6881676A patent/JPS52152171A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60201628A (en) * | 1984-03-26 | 1985-10-12 | Sharp Corp | Production of semiconductor integrated circuit |
JPH0141247B2 (en) * | 1984-03-26 | 1989-09-04 | Sharp Kk | |
JPS61187343A (en) * | 1985-02-15 | 1986-08-21 | Nec Corp | Semiconductor substrate |
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