JPS5251870A - Electron bean exposure method - Google Patents
Electron bean exposure methodInfo
- Publication number
- JPS5251870A JPS5251870A JP12714775A JP12714775A JPS5251870A JP S5251870 A JPS5251870 A JP S5251870A JP 12714775 A JP12714775 A JP 12714775A JP 12714775 A JP12714775 A JP 12714775A JP S5251870 A JPS5251870 A JP S5251870A
- Authority
- JP
- Japan
- Prior art keywords
- exposure method
- electron bean
- bean exposure
- sample
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To depict patterns analogous to arbitrary patterns on sample by exposing the sample to light several times using plural masks comprising dividing of one pattern.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12714775A JPS5251870A (en) | 1975-10-22 | 1975-10-22 | Electron bean exposure method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12714775A JPS5251870A (en) | 1975-10-22 | 1975-10-22 | Electron bean exposure method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5251870A true JPS5251870A (en) | 1977-04-26 |
Family
ID=14952768
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12714775A Pending JPS5251870A (en) | 1975-10-22 | 1975-10-22 | Electron bean exposure method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5251870A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5463681A (en) * | 1977-10-29 | 1979-05-22 | Nippon Aviotronics Kk | Electron beam exposure device |
JPS5682305U (en) * | 1979-11-28 | 1981-07-03 | ||
JP2006137496A (en) * | 2004-11-10 | 2006-06-01 | China Internatl Marine Containers (Group) Co Ltd | Folding box for container semi-trailer transportation |
JP2007106442A (en) * | 2005-10-13 | 2007-04-26 | Kyocera Mita Corp | Pallet |
-
1975
- 1975-10-22 JP JP12714775A patent/JPS5251870A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5463681A (en) * | 1977-10-29 | 1979-05-22 | Nippon Aviotronics Kk | Electron beam exposure device |
JPS626341B2 (en) * | 1977-10-29 | 1987-02-10 | Nippon Avionics Co Ltd | |
JPS5682305U (en) * | 1979-11-28 | 1981-07-03 | ||
JP2006137496A (en) * | 2004-11-10 | 2006-06-01 | China Internatl Marine Containers (Group) Co Ltd | Folding box for container semi-trailer transportation |
JP2007106442A (en) * | 2005-10-13 | 2007-04-26 | Kyocera Mita Corp | Pallet |
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