JPS5251870A - Electron bean exposure method - Google Patents

Electron bean exposure method

Info

Publication number
JPS5251870A
JPS5251870A JP12714775A JP12714775A JPS5251870A JP S5251870 A JPS5251870 A JP S5251870A JP 12714775 A JP12714775 A JP 12714775A JP 12714775 A JP12714775 A JP 12714775A JP S5251870 A JPS5251870 A JP S5251870A
Authority
JP
Japan
Prior art keywords
exposure method
electron bean
bean exposure
sample
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12714775A
Other languages
Japanese (ja)
Inventor
Kazumitsu Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP12714775A priority Critical patent/JPS5251870A/en
Publication of JPS5251870A publication Critical patent/JPS5251870A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To depict patterns analogous to arbitrary patterns on sample by exposing the sample to light several times using plural masks comprising dividing of one pattern.
COPYRIGHT: (C)1977,JPO&Japio
JP12714775A 1975-10-22 1975-10-22 Electron bean exposure method Pending JPS5251870A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12714775A JPS5251870A (en) 1975-10-22 1975-10-22 Electron bean exposure method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12714775A JPS5251870A (en) 1975-10-22 1975-10-22 Electron bean exposure method

Publications (1)

Publication Number Publication Date
JPS5251870A true JPS5251870A (en) 1977-04-26

Family

ID=14952768

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12714775A Pending JPS5251870A (en) 1975-10-22 1975-10-22 Electron bean exposure method

Country Status (1)

Country Link
JP (1) JPS5251870A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5463681A (en) * 1977-10-29 1979-05-22 Nippon Aviotronics Kk Electron beam exposure device
JPS5682305U (en) * 1979-11-28 1981-07-03
JP2006137496A (en) * 2004-11-10 2006-06-01 China Internatl Marine Containers (Group) Co Ltd Folding box for container semi-trailer transportation
JP2007106442A (en) * 2005-10-13 2007-04-26 Kyocera Mita Corp Pallet

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5463681A (en) * 1977-10-29 1979-05-22 Nippon Aviotronics Kk Electron beam exposure device
JPS626341B2 (en) * 1977-10-29 1987-02-10 Nippon Avionics Co Ltd
JPS5682305U (en) * 1979-11-28 1981-07-03
JP2006137496A (en) * 2004-11-10 2006-06-01 China Internatl Marine Containers (Group) Co Ltd Folding box for container semi-trailer transportation
JP2007106442A (en) * 2005-10-13 2007-04-26 Kyocera Mita Corp Pallet

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