JPS5286071A - Metallic mask - Google Patents
Metallic maskInfo
- Publication number
- JPS5286071A JPS5286071A JP204776A JP204776A JPS5286071A JP S5286071 A JPS5286071 A JP S5286071A JP 204776 A JP204776 A JP 204776A JP 204776 A JP204776 A JP 204776A JP S5286071 A JPS5286071 A JP S5286071A
- Authority
- JP
- Japan
- Prior art keywords
- metallic mask
- mask
- metallic
- scratch
- photoresist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
PURPOSE: To obtain metallic mask which does not scratch photoresist on the wafer.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP204776A JPS5286071A (en) | 1976-01-12 | 1976-01-12 | Metallic mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP204776A JPS5286071A (en) | 1976-01-12 | 1976-01-12 | Metallic mask |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5286071A true JPS5286071A (en) | 1977-07-16 |
Family
ID=11518404
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP204776A Pending JPS5286071A (en) | 1976-01-12 | 1976-01-12 | Metallic mask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5286071A (en) |
-
1976
- 1976-01-12 JP JP204776A patent/JPS5286071A/en active Pending
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