JPS5286071A - Metallic mask - Google Patents

Metallic mask

Info

Publication number
JPS5286071A
JPS5286071A JP204776A JP204776A JPS5286071A JP S5286071 A JPS5286071 A JP S5286071A JP 204776 A JP204776 A JP 204776A JP 204776 A JP204776 A JP 204776A JP S5286071 A JPS5286071 A JP S5286071A
Authority
JP
Japan
Prior art keywords
metallic mask
mask
metallic
scratch
photoresist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP204776A
Other languages
Japanese (ja)
Inventor
Michio Hirai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP204776A priority Critical patent/JPS5286071A/en
Publication of JPS5286071A publication Critical patent/JPS5286071A/en
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

PURPOSE: To obtain metallic mask which does not scratch photoresist on the wafer.
COPYRIGHT: (C)1977,JPO&Japio
JP204776A 1976-01-12 1976-01-12 Metallic mask Pending JPS5286071A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP204776A JPS5286071A (en) 1976-01-12 1976-01-12 Metallic mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP204776A JPS5286071A (en) 1976-01-12 1976-01-12 Metallic mask

Publications (1)

Publication Number Publication Date
JPS5286071A true JPS5286071A (en) 1977-07-16

Family

ID=11518404

Family Applications (1)

Application Number Title Priority Date Filing Date
JP204776A Pending JPS5286071A (en) 1976-01-12 1976-01-12 Metallic mask

Country Status (1)

Country Link
JP (1) JPS5286071A (en)

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