JPS51111073A - Fine pattern forming - Google Patents
Fine pattern formingInfo
- Publication number
- JPS51111073A JPS51111073A JP50035580A JP3558075A JPS51111073A JP S51111073 A JPS51111073 A JP S51111073A JP 50035580 A JP50035580 A JP 50035580A JP 3558075 A JP3558075 A JP 3558075A JP S51111073 A JPS51111073 A JP S51111073A
- Authority
- JP
- Japan
- Prior art keywords
- pattern forming
- fine pattern
- light
- standing wave
- processing accuracy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: In fine pattern forming, to prevent reduction in processing accuracy caused by the standing wave of the light in the photo resistor.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50035580A JPS51111073A (en) | 1975-03-26 | 1975-03-26 | Fine pattern forming |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50035580A JPS51111073A (en) | 1975-03-26 | 1975-03-26 | Fine pattern forming |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51111073A true JPS51111073A (en) | 1976-10-01 |
Family
ID=12445695
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50035580A Pending JPS51111073A (en) | 1975-03-26 | 1975-03-26 | Fine pattern forming |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51111073A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5679428A (en) * | 1979-12-03 | 1981-06-30 | Hitachi Ltd | Working of ultra-fine article |
JPS57172735A (en) * | 1981-03-30 | 1982-10-23 | Yokogawa Hewlett Packard Ltd | Multilayer photoresist processing |
JPS5892223A (en) * | 1981-11-27 | 1983-06-01 | Matsushita Electronics Corp | Resist pattern formation |
JPS5895383U (en) * | 1981-12-22 | 1983-06-28 | ヤンマー農機株式会社 | Crawler position confirmation device for agricultural machines equipped with endless track belts |
JPS58154285A (en) * | 1982-03-10 | 1983-09-13 | Agency Of Ind Science & Technol | Manufacture of diffraction grating |
-
1975
- 1975-03-26 JP JP50035580A patent/JPS51111073A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5679428A (en) * | 1979-12-03 | 1981-06-30 | Hitachi Ltd | Working of ultra-fine article |
JPS57172735A (en) * | 1981-03-30 | 1982-10-23 | Yokogawa Hewlett Packard Ltd | Multilayer photoresist processing |
JPS6358367B2 (en) * | 1981-03-30 | 1988-11-15 | Yokogawa Hyuuretsuto Patsukaado Kk | |
JPS5892223A (en) * | 1981-11-27 | 1983-06-01 | Matsushita Electronics Corp | Resist pattern formation |
JPS5895383U (en) * | 1981-12-22 | 1983-06-28 | ヤンマー農機株式会社 | Crawler position confirmation device for agricultural machines equipped with endless track belts |
JPS58154285A (en) * | 1982-03-10 | 1983-09-13 | Agency Of Ind Science & Technol | Manufacture of diffraction grating |
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