JPS5228267A - Minute processing - Google Patents

Minute processing

Info

Publication number
JPS5228267A
JPS5228267A JP10346675A JP10346675A JPS5228267A JP S5228267 A JPS5228267 A JP S5228267A JP 10346675 A JP10346675 A JP 10346675A JP 10346675 A JP10346675 A JP 10346675A JP S5228267 A JPS5228267 A JP S5228267A
Authority
JP
Japan
Prior art keywords
minute processing
pattern
minute
processing
residnal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10346675A
Other languages
Japanese (ja)
Inventor
Masaru Asano
Tetsutada Sakurai
Yoshio Haruhara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP10346675A priority Critical patent/JPS5228267A/en
Publication of JPS5228267A publication Critical patent/JPS5228267A/en
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Weting (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To obtain complete pattern by bombarding particles onto the imcomlete pattern which has a residnal of photo resist at an opening.
COPYRIGHT: (C)1977,JPO&Japio
JP10346675A 1975-08-28 1975-08-28 Minute processing Pending JPS5228267A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10346675A JPS5228267A (en) 1975-08-28 1975-08-28 Minute processing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10346675A JPS5228267A (en) 1975-08-28 1975-08-28 Minute processing

Publications (1)

Publication Number Publication Date
JPS5228267A true JPS5228267A (en) 1977-03-03

Family

ID=14354777

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10346675A Pending JPS5228267A (en) 1975-08-28 1975-08-28 Minute processing

Country Status (1)

Country Link
JP (1) JPS5228267A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5465942U (en) * 1977-10-19 1979-05-10
JPS56167330A (en) * 1980-05-29 1981-12-23 Nippon Telegr & Teleph Corp <Ntt> Fine pattern forming method
JPS5898924A (en) * 1981-12-08 1983-06-13 Matsushita Electronics Corp Minute pattern forming method
JPS59121841A (en) * 1982-12-20 1984-07-14 Fujitsu Ltd Pattern formation

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4834039A (en) * 1971-09-03 1973-05-15

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4834039A (en) * 1971-09-03 1973-05-15

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5465942U (en) * 1977-10-19 1979-05-10
JPS56167330A (en) * 1980-05-29 1981-12-23 Nippon Telegr & Teleph Corp <Ntt> Fine pattern forming method
JPS6230493B2 (en) * 1980-05-29 1987-07-02 Nippon Telegraph & Telephone
JPS5898924A (en) * 1981-12-08 1983-06-13 Matsushita Electronics Corp Minute pattern forming method
JPS6224941B2 (en) * 1981-12-08 1987-05-30 Matsushita Electronics Corp
JPS59121841A (en) * 1982-12-20 1984-07-14 Fujitsu Ltd Pattern formation

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