JPS5228267A - Minute processing - Google Patents
Minute processingInfo
- Publication number
- JPS5228267A JPS5228267A JP10346675A JP10346675A JPS5228267A JP S5228267 A JPS5228267 A JP S5228267A JP 10346675 A JP10346675 A JP 10346675A JP 10346675 A JP10346675 A JP 10346675A JP S5228267 A JPS5228267 A JP S5228267A
- Authority
- JP
- Japan
- Prior art keywords
- minute processing
- pattern
- minute
- processing
- residnal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Weting (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE: To obtain complete pattern by bombarding particles onto the imcomlete pattern which has a residnal of photo resist at an opening.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10346675A JPS5228267A (en) | 1975-08-28 | 1975-08-28 | Minute processing |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10346675A JPS5228267A (en) | 1975-08-28 | 1975-08-28 | Minute processing |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5228267A true JPS5228267A (en) | 1977-03-03 |
Family
ID=14354777
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10346675A Pending JPS5228267A (en) | 1975-08-28 | 1975-08-28 | Minute processing |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5228267A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5465942U (en) * | 1977-10-19 | 1979-05-10 | ||
JPS56167330A (en) * | 1980-05-29 | 1981-12-23 | Nippon Telegr & Teleph Corp <Ntt> | Fine pattern forming method |
JPS5898924A (en) * | 1981-12-08 | 1983-06-13 | Matsushita Electronics Corp | Minute pattern forming method |
JPS59121841A (en) * | 1982-12-20 | 1984-07-14 | Fujitsu Ltd | Pattern formation |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4834039A (en) * | 1971-09-03 | 1973-05-15 |
-
1975
- 1975-08-28 JP JP10346675A patent/JPS5228267A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4834039A (en) * | 1971-09-03 | 1973-05-15 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5465942U (en) * | 1977-10-19 | 1979-05-10 | ||
JPS56167330A (en) * | 1980-05-29 | 1981-12-23 | Nippon Telegr & Teleph Corp <Ntt> | Fine pattern forming method |
JPS6230493B2 (en) * | 1980-05-29 | 1987-07-02 | Nippon Telegraph & Telephone | |
JPS5898924A (en) * | 1981-12-08 | 1983-06-13 | Matsushita Electronics Corp | Minute pattern forming method |
JPS6224941B2 (en) * | 1981-12-08 | 1987-05-30 | Matsushita Electronics Corp | |
JPS59121841A (en) * | 1982-12-20 | 1984-07-14 | Fujitsu Ltd | Pattern formation |
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