JPS5422171A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5422171A JPS5422171A JP8611977A JP8611977A JPS5422171A JP S5422171 A JPS5422171 A JP S5422171A JP 8611977 A JP8611977 A JP 8611977A JP 8611977 A JP8611977 A JP 8611977A JP S5422171 A JPS5422171 A JP S5422171A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- securing
- ensure
- formation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
- Non-Volatile Memory (AREA)
Abstract
PURPOSE: To ensure a formation of an accurate pattern through a continuous etching by securing nearly identical impurity density between the upper and lower electrode layers.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8611977A JPS5422171A (en) | 1977-07-20 | 1977-07-20 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8611977A JPS5422171A (en) | 1977-07-20 | 1977-07-20 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5422171A true JPS5422171A (en) | 1979-02-19 |
Family
ID=13877798
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8611977A Pending JPS5422171A (en) | 1977-07-20 | 1977-07-20 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5422171A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56116671A (en) * | 1980-02-20 | 1981-09-12 | Toshiba Corp | Semiconductor device |
JPS56124272A (en) * | 1980-03-05 | 1981-09-29 | Toshiba Corp | Manufacture of semiconductor device |
JPS6057940A (en) * | 1983-09-09 | 1985-04-03 | Matsushita Electronics Corp | Manufacture of semiconductor device |
-
1977
- 1977-07-20 JP JP8611977A patent/JPS5422171A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56116671A (en) * | 1980-02-20 | 1981-09-12 | Toshiba Corp | Semiconductor device |
JPS56124272A (en) * | 1980-03-05 | 1981-09-29 | Toshiba Corp | Manufacture of semiconductor device |
JPS6057940A (en) * | 1983-09-09 | 1985-04-03 | Matsushita Electronics Corp | Manufacture of semiconductor device |
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