JPS5422171A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5422171A
JPS5422171A JP8611977A JP8611977A JPS5422171A JP S5422171 A JPS5422171 A JP S5422171A JP 8611977 A JP8611977 A JP 8611977A JP 8611977 A JP8611977 A JP 8611977A JP S5422171 A JPS5422171 A JP S5422171A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
securing
ensure
formation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8611977A
Other languages
Japanese (ja)
Inventor
Makoto Omura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP8611977A priority Critical patent/JPS5422171A/en
Publication of JPS5422171A publication Critical patent/JPS5422171A/en
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Non-Volatile Memory (AREA)

Abstract

PURPOSE: To ensure a formation of an accurate pattern through a continuous etching by securing nearly identical impurity density between the upper and lower electrode layers.
COPYRIGHT: (C)1979,JPO&Japio
JP8611977A 1977-07-20 1977-07-20 Manufacture of semiconductor device Pending JPS5422171A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8611977A JPS5422171A (en) 1977-07-20 1977-07-20 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8611977A JPS5422171A (en) 1977-07-20 1977-07-20 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5422171A true JPS5422171A (en) 1979-02-19

Family

ID=13877798

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8611977A Pending JPS5422171A (en) 1977-07-20 1977-07-20 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5422171A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56116671A (en) * 1980-02-20 1981-09-12 Toshiba Corp Semiconductor device
JPS56124272A (en) * 1980-03-05 1981-09-29 Toshiba Corp Manufacture of semiconductor device
JPS6057940A (en) * 1983-09-09 1985-04-03 Matsushita Electronics Corp Manufacture of semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56116671A (en) * 1980-02-20 1981-09-12 Toshiba Corp Semiconductor device
JPS56124272A (en) * 1980-03-05 1981-09-29 Toshiba Corp Manufacture of semiconductor device
JPS6057940A (en) * 1983-09-09 1985-04-03 Matsushita Electronics Corp Manufacture of semiconductor device

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