JPS5388571A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5388571A JPS5388571A JP334377A JP334377A JPS5388571A JP S5388571 A JPS5388571 A JP S5388571A JP 334377 A JP334377 A JP 334377A JP 334377 A JP334377 A JP 334377A JP S5388571 A JPS5388571 A JP S5388571A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- self
- contact holes
- wiring layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To obtain fine patterns by forming contact holes connecting semiconductor regions and electrode wiring layers by a self-alignment method.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP334377A JPS5388571A (en) | 1977-01-14 | 1977-01-14 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP334377A JPS5388571A (en) | 1977-01-14 | 1977-01-14 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5388571A true JPS5388571A (en) | 1978-08-04 |
Family
ID=11554702
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP334377A Pending JPS5388571A (en) | 1977-01-14 | 1977-01-14 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5388571A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55111161A (en) * | 1979-02-20 | 1980-08-27 | Nec Corp | Semiconductor device and manufacturing method thereof |
-
1977
- 1977-01-14 JP JP334377A patent/JPS5388571A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55111161A (en) * | 1979-02-20 | 1980-08-27 | Nec Corp | Semiconductor device and manufacturing method thereof |
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