JPS5388571A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5388571A
JPS5388571A JP334377A JP334377A JPS5388571A JP S5388571 A JPS5388571 A JP S5388571A JP 334377 A JP334377 A JP 334377A JP 334377 A JP334377 A JP 334377A JP S5388571 A JPS5388571 A JP S5388571A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
self
contact holes
wiring layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP334377A
Other languages
Japanese (ja)
Inventor
Akio Takahashi
Masaru Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP334377A priority Critical patent/JPS5388571A/en
Publication of JPS5388571A publication Critical patent/JPS5388571A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To obtain fine patterns by forming contact holes connecting semiconductor regions and electrode wiring layers by a self-alignment method.
COPYRIGHT: (C)1978,JPO&Japio
JP334377A 1977-01-14 1977-01-14 Production of semiconductor device Pending JPS5388571A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP334377A JPS5388571A (en) 1977-01-14 1977-01-14 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP334377A JPS5388571A (en) 1977-01-14 1977-01-14 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5388571A true JPS5388571A (en) 1978-08-04

Family

ID=11554702

Family Applications (1)

Application Number Title Priority Date Filing Date
JP334377A Pending JPS5388571A (en) 1977-01-14 1977-01-14 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5388571A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55111161A (en) * 1979-02-20 1980-08-27 Nec Corp Semiconductor device and manufacturing method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55111161A (en) * 1979-02-20 1980-08-27 Nec Corp Semiconductor device and manufacturing method thereof

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