JPS5236975A - Process for production of semiconductor device - Google Patents

Process for production of semiconductor device

Info

Publication number
JPS5236975A
JPS5236975A JP11280975A JP11280975A JPS5236975A JP S5236975 A JPS5236975 A JP S5236975A JP 11280975 A JP11280975 A JP 11280975A JP 11280975 A JP11280975 A JP 11280975A JP S5236975 A JPS5236975 A JP S5236975A
Authority
JP
Japan
Prior art keywords
semiconductor
production
lift
low resistance
electrode wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11280975A
Other languages
Japanese (ja)
Inventor
Hideo Sei
Makoto Ito
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP11280975A priority Critical patent/JPS5236975A/en
Publication of JPS5236975A publication Critical patent/JPS5236975A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: A process for forming electrode wiring of low resistance by lift-off method.
COPYRIGHT: (C)1977,JPO&Japio
JP11280975A 1975-09-18 1975-09-18 Process for production of semiconductor device Pending JPS5236975A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11280975A JPS5236975A (en) 1975-09-18 1975-09-18 Process for production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11280975A JPS5236975A (en) 1975-09-18 1975-09-18 Process for production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5236975A true JPS5236975A (en) 1977-03-22

Family

ID=14596061

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11280975A Pending JPS5236975A (en) 1975-09-18 1975-09-18 Process for production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5236975A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4335506A (en) * 1980-08-04 1982-06-22 International Business Machines Corporation Method of forming aluminum/copper alloy conductors
JPS5893261A (en) * 1981-11-30 1983-06-02 Toshiba Corp Manufacture of semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4335506A (en) * 1980-08-04 1982-06-22 International Business Machines Corporation Method of forming aluminum/copper alloy conductors
JPS5893261A (en) * 1981-11-30 1983-06-02 Toshiba Corp Manufacture of semiconductor device
JPH0570301B2 (en) * 1981-11-30 1993-10-04 Tokyo Shibaura Electric Co

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