JPS524780A - Manufacturing method of semiconductor equipment - Google Patents
Manufacturing method of semiconductor equipmentInfo
- Publication number
- JPS524780A JPS524780A JP8122275A JP8122275A JPS524780A JP S524780 A JPS524780 A JP S524780A JP 8122275 A JP8122275 A JP 8122275A JP 8122275 A JP8122275 A JP 8122275A JP S524780 A JPS524780 A JP S524780A
- Authority
- JP
- Japan
- Prior art keywords
- manufacturing
- semiconductor equipment
- making
- circuit
- wiring short
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To eliminate wiring short-circuit by making a groove beforehand in the scribe zone.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8122275A JPS524780A (en) | 1975-07-01 | 1975-07-01 | Manufacturing method of semiconductor equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8122275A JPS524780A (en) | 1975-07-01 | 1975-07-01 | Manufacturing method of semiconductor equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS524780A true JPS524780A (en) | 1977-01-14 |
Family
ID=13740442
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8122275A Pending JPS524780A (en) | 1975-07-01 | 1975-07-01 | Manufacturing method of semiconductor equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS524780A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5462539A (en) * | 1977-10-27 | 1979-05-19 | Furukawa Electric Co Ltd:The | Two-dimensional heater for high temperature |
JPS5591094U (en) * | 1978-12-18 | 1980-06-24 | ||
JPS5593990U (en) * | 1978-12-22 | 1980-06-28 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51113459A (en) * | 1975-03-29 | 1976-10-06 | Nec Home Electronics Ltd | A method for manufacturing semiconductor devices |
-
1975
- 1975-07-01 JP JP8122275A patent/JPS524780A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51113459A (en) * | 1975-03-29 | 1976-10-06 | Nec Home Electronics Ltd | A method for manufacturing semiconductor devices |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5462539A (en) * | 1977-10-27 | 1979-05-19 | Furukawa Electric Co Ltd:The | Two-dimensional heater for high temperature |
JPS5591094U (en) * | 1978-12-18 | 1980-06-24 | ||
JPS5593990U (en) * | 1978-12-22 | 1980-06-28 |
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