JPS5363885A - Production apparatus of solid device - Google Patents

Production apparatus of solid device

Info

Publication number
JPS5363885A
JPS5363885A JP13922376A JP13922376A JPS5363885A JP S5363885 A JPS5363885 A JP S5363885A JP 13922376 A JP13922376 A JP 13922376A JP 13922376 A JP13922376 A JP 13922376A JP S5363885 A JPS5363885 A JP S5363885A
Authority
JP
Japan
Prior art keywords
production apparatus
solid device
solid
improve
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13922376A
Other languages
Japanese (ja)
Other versions
JPS5811755B2 (en
Inventor
Akira Sano
Hajime Tagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP51139223A priority Critical patent/JPS5811755B2/en
Publication of JPS5363885A publication Critical patent/JPS5363885A/en
Publication of JPS5811755B2 publication Critical patent/JPS5811755B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Light Receiving Elements (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Die Bonding (AREA)

Abstract

PURPOSE: To improve the manufacturing work efficiency of solid devices by making possible direct viewing of elements and vacuum chuck.
COPYRIGHT: (C)1978,JPO&Japio
JP51139223A 1976-11-18 1976-11-18 Solid state device manufacturing equipment Expired JPS5811755B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51139223A JPS5811755B2 (en) 1976-11-18 1976-11-18 Solid state device manufacturing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51139223A JPS5811755B2 (en) 1976-11-18 1976-11-18 Solid state device manufacturing equipment

Publications (2)

Publication Number Publication Date
JPS5363885A true JPS5363885A (en) 1978-06-07
JPS5811755B2 JPS5811755B2 (en) 1983-03-04

Family

ID=15240360

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51139223A Expired JPS5811755B2 (en) 1976-11-18 1976-11-18 Solid state device manufacturing equipment

Country Status (1)

Country Link
JP (1) JPS5811755B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017163645A (en) 2016-03-08 2017-09-14 Ntn株式会社 Vehicle driving device

Also Published As

Publication number Publication date
JPS5811755B2 (en) 1983-03-04

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