JPS51146194A - Diode device fabrication method - Google Patents

Diode device fabrication method

Info

Publication number
JPS51146194A
JPS51146194A JP6290275A JP6290275A JPS51146194A JP S51146194 A JPS51146194 A JP S51146194A JP 6290275 A JP6290275 A JP 6290275A JP 6290275 A JP6290275 A JP 6290275A JP S51146194 A JPS51146194 A JP S51146194A
Authority
JP
Japan
Prior art keywords
diode device
fabrication method
device fabrication
formation
manufacturing process
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6290275A
Other languages
Japanese (ja)
Inventor
Noboru Horie
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6290275A priority Critical patent/JPS51146194A/en
Publication of JPS51146194A publication Critical patent/JPS51146194A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: A diode device fabrication method, that simplifies manufacturing process and further promotes fabrication yield at formation of a diode device insulating between elements by V type groove.
COPYRIGHT: (C)1976,JPO&Japio
JP6290275A 1975-05-28 1975-05-28 Diode device fabrication method Pending JPS51146194A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6290275A JPS51146194A (en) 1975-05-28 1975-05-28 Diode device fabrication method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6290275A JPS51146194A (en) 1975-05-28 1975-05-28 Diode device fabrication method

Publications (1)

Publication Number Publication Date
JPS51146194A true JPS51146194A (en) 1976-12-15

Family

ID=13213636

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6290275A Pending JPS51146194A (en) 1975-05-28 1975-05-28 Diode device fabrication method

Country Status (1)

Country Link
JP (1) JPS51146194A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55153345A (en) * 1979-05-18 1980-11-29 Fujitsu Ltd Manufacture of semiconductor device
JPS5968972A (en) * 1982-10-12 1984-04-19 Mitsubishi Electric Corp Gate turn off thyristor
JPS6189646A (en) * 1984-10-03 1986-05-07 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Processing of semiconductor structure

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4979792A (en) * 1972-12-08 1974-08-01

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4979792A (en) * 1972-12-08 1974-08-01

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55153345A (en) * 1979-05-18 1980-11-29 Fujitsu Ltd Manufacture of semiconductor device
JPS5968972A (en) * 1982-10-12 1984-04-19 Mitsubishi Electric Corp Gate turn off thyristor
JPS6189646A (en) * 1984-10-03 1986-05-07 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Processing of semiconductor structure
JPH0478179B2 (en) * 1984-10-03 1992-12-10 Intaanashonaru Bijinesu Mashiinzu Corp

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