JPS51123559A - Production method of aerial phase growth wafer - Google Patents
Production method of aerial phase growth waferInfo
- Publication number
- JPS51123559A JPS51123559A JP4821475A JP4821475A JPS51123559A JP S51123559 A JPS51123559 A JP S51123559A JP 4821475 A JP4821475 A JP 4821475A JP 4821475 A JP4821475 A JP 4821475A JP S51123559 A JPS51123559 A JP S51123559A
- Authority
- JP
- Japan
- Prior art keywords
- phase growth
- production method
- aerial phase
- growth wafer
- aerial
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
PURPOSE: To reduce outdoping phenomenon at the time of manufacturing a semiconductor by aerial phase growth.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4821475A JPS51123559A (en) | 1975-04-22 | 1975-04-22 | Production method of aerial phase growth wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4821475A JPS51123559A (en) | 1975-04-22 | 1975-04-22 | Production method of aerial phase growth wafer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51123559A true JPS51123559A (en) | 1976-10-28 |
Family
ID=12797148
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4821475A Pending JPS51123559A (en) | 1975-04-22 | 1975-04-22 | Production method of aerial phase growth wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51123559A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2022075369A1 (en) * | 2020-10-09 | 2022-04-14 | 高見澤彰一 | Method for producing silicon epitaxial wafer |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4915989A (en) * | 1972-06-07 | 1974-02-12 | ||
JPS4919946A (en) * | 1972-06-12 | 1974-02-21 |
-
1975
- 1975-04-22 JP JP4821475A patent/JPS51123559A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4915989A (en) * | 1972-06-07 | 1974-02-12 | ||
JPS4919946A (en) * | 1972-06-12 | 1974-02-21 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2022075369A1 (en) * | 2020-10-09 | 2022-04-14 | 高見澤彰一 | Method for producing silicon epitaxial wafer |
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