JPS4919946A - - Google Patents
Info
- Publication number
- JPS4919946A JPS4919946A JP5841772A JP5841772A JPS4919946A JP S4919946 A JPS4919946 A JP S4919946A JP 5841772 A JP5841772 A JP 5841772A JP 5841772 A JP5841772 A JP 5841772A JP S4919946 A JPS4919946 A JP S4919946A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5841772A JPS4919946A (en) | 1972-06-12 | 1972-06-12 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5841772A JPS4919946A (en) | 1972-06-12 | 1972-06-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS4919946A true JPS4919946A (en) | 1974-02-21 |
Family
ID=13083792
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5841772A Pending JPS4919946A (en) | 1972-06-12 | 1972-06-12 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS4919946A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51102553A (en) * | 1975-03-07 | 1976-09-10 | Hitachi Ltd | HANDOTAISOCHINOSEIZOHOHO |
JPS51123559A (en) * | 1975-04-22 | 1976-10-28 | Komatsu Denshi Kinzoku Kk | Production method of aerial phase growth wafer |
JPS5339858A (en) * | 1976-09-24 | 1978-04-12 | Nec Corp | Impurity diffusion method |
US9613809B2 (en) | 2013-03-08 | 2017-04-04 | Sumitomo Electric Industries, Ltd. | Method of manufacturing silicon carbide semiconductor device |
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1972
- 1972-06-12 JP JP5841772A patent/JPS4919946A/ja active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51102553A (en) * | 1975-03-07 | 1976-09-10 | Hitachi Ltd | HANDOTAISOCHINOSEIZOHOHO |
JPS51123559A (en) * | 1975-04-22 | 1976-10-28 | Komatsu Denshi Kinzoku Kk | Production method of aerial phase growth wafer |
JPS5339858A (en) * | 1976-09-24 | 1978-04-12 | Nec Corp | Impurity diffusion method |
US9613809B2 (en) | 2013-03-08 | 2017-04-04 | Sumitomo Electric Industries, Ltd. | Method of manufacturing silicon carbide semiconductor device |