JPS51147958A - Method for forming metal electrode - Google Patents

Method for forming metal electrode

Info

Publication number
JPS51147958A
JPS51147958A JP7222575A JP7222575A JPS51147958A JP S51147958 A JPS51147958 A JP S51147958A JP 7222575 A JP7222575 A JP 7222575A JP 7222575 A JP7222575 A JP 7222575A JP S51147958 A JPS51147958 A JP S51147958A
Authority
JP
Japan
Prior art keywords
metal electrode
forming metal
lift
forming
shorten
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7222575A
Other languages
Japanese (ja)
Other versions
JPS5823739B2 (en
Inventor
Michio Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7222575A priority Critical patent/JPS5823739B2/en
Publication of JPS51147958A publication Critical patent/JPS51147958A/en
Publication of JPS5823739B2 publication Critical patent/JPS5823739B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Weting (AREA)

Abstract

PURPOSE: In forming a metal electrode through a lift-off method, to shorten the lift-off time for the effective production of semiconductor devices.
COPYRIGHT: (C)1976,JPO&Japio
JP7222575A 1975-06-14 1975-06-14 Kinzoku Den Kiyokuno Keisei Hohou Expired JPS5823739B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7222575A JPS5823739B2 (en) 1975-06-14 1975-06-14 Kinzoku Den Kiyokuno Keisei Hohou

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7222575A JPS5823739B2 (en) 1975-06-14 1975-06-14 Kinzoku Den Kiyokuno Keisei Hohou

Publications (2)

Publication Number Publication Date
JPS51147958A true JPS51147958A (en) 1976-12-18
JPS5823739B2 JPS5823739B2 (en) 1983-05-17

Family

ID=13483092

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7222575A Expired JPS5823739B2 (en) 1975-06-14 1975-06-14 Kinzoku Den Kiyokuno Keisei Hohou

Country Status (1)

Country Link
JP (1) JPS5823739B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55125627A (en) * 1979-03-22 1980-09-27 Hitachi Ltd Formation of electrode for semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55125627A (en) * 1979-03-22 1980-09-27 Hitachi Ltd Formation of electrode for semiconductor device

Also Published As

Publication number Publication date
JPS5823739B2 (en) 1983-05-17

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