JPS51150986A - Fabrication method of semiconductor device - Google Patents
Fabrication method of semiconductor deviceInfo
- Publication number
- JPS51150986A JPS51150986A JP7490575A JP7490575A JPS51150986A JP S51150986 A JPS51150986 A JP S51150986A JP 7490575 A JP7490575 A JP 7490575A JP 7490575 A JP7490575 A JP 7490575A JP S51150986 A JPS51150986 A JP S51150986A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- fabrication method
- oxidization
- fabricate
- activation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: How to fabricate in a simple way, a semiconductor device which has a metal part by oxidization of metal layer after activation.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7490575A JPS51150986A (en) | 1975-06-19 | 1975-06-19 | Fabrication method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7490575A JPS51150986A (en) | 1975-06-19 | 1975-06-19 | Fabrication method of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51150986A true JPS51150986A (en) | 1976-12-24 |
JPS5751926B2 JPS5751926B2 (en) | 1982-11-05 |
Family
ID=13560860
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7490575A Granted JPS51150986A (en) | 1975-06-19 | 1975-06-19 | Fabrication method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51150986A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6184066A (en) * | 1984-10-01 | 1986-04-28 | Oki Electric Ind Co Ltd | Manufacture of thin film transistor |
JPS6184065A (en) * | 1984-10-01 | 1986-04-28 | Oki Electric Ind Co Ltd | Manufacture of thin film transistor |
JPS6189673A (en) * | 1984-10-09 | 1986-05-07 | Matsushita Electric Ind Co Ltd | Manufacture of thin film semiconductor device |
JPH047876A (en) * | 1990-04-25 | 1992-01-13 | Nec Corp | Thin film transistor |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5927513U (en) * | 1982-08-13 | 1984-02-21 | 日本精密工業株式会社 | Focus adjustment device with focus detection element protection shutter |
-
1975
- 1975-06-19 JP JP7490575A patent/JPS51150986A/en active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6184066A (en) * | 1984-10-01 | 1986-04-28 | Oki Electric Ind Co Ltd | Manufacture of thin film transistor |
JPS6184065A (en) * | 1984-10-01 | 1986-04-28 | Oki Electric Ind Co Ltd | Manufacture of thin film transistor |
JPS6189673A (en) * | 1984-10-09 | 1986-05-07 | Matsushita Electric Ind Co Ltd | Manufacture of thin film semiconductor device |
JPH047876A (en) * | 1990-04-25 | 1992-01-13 | Nec Corp | Thin film transistor |
Also Published As
Publication number | Publication date |
---|---|
JPS5751926B2 (en) | 1982-11-05 |
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