JPS5214378A - Method for production of semiconductor device - Google Patents

Method for production of semiconductor device

Info

Publication number
JPS5214378A
JPS5214378A JP9012975A JP9012975A JPS5214378A JP S5214378 A JPS5214378 A JP S5214378A JP 9012975 A JP9012975 A JP 9012975A JP 9012975 A JP9012975 A JP 9012975A JP S5214378 A JPS5214378 A JP S5214378A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
mosic
ion
injection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9012975A
Other languages
Japanese (ja)
Inventor
Yutaka Hayashi
Yasuo Tarui
Isao Okura
Masashi Omori
Kazuhiro Shimotori
Kenji Anami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP9012975A priority Critical patent/JPS5214378A/en
Publication of JPS5214378A publication Critical patent/JPS5214378A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To fabricate highly integrated MOSIC by using a method of ion-injection in high speed.
COPYRIGHT: (C)1977,JPO&Japio
JP9012975A 1975-07-25 1975-07-25 Method for production of semiconductor device Pending JPS5214378A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9012975A JPS5214378A (en) 1975-07-25 1975-07-25 Method for production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9012975A JPS5214378A (en) 1975-07-25 1975-07-25 Method for production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5214378A true JPS5214378A (en) 1977-02-03

Family

ID=13989889

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9012975A Pending JPS5214378A (en) 1975-07-25 1975-07-25 Method for production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5214378A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5698019A (en) * 1979-12-31 1981-08-07 Nippon Dempa Kogyo Co Ltd Lead wire connecting method for tuning fork type quartz oscillator
JPS5698020A (en) * 1979-12-31 1981-08-07 Nippon Dempa Kogyo Co Ltd Lead wire connection method for tuning fork type quartz oscillator

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4831516A (en) * 1971-08-26 1973-04-25
JPS4984589A (en) * 1972-12-19 1974-08-14

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4831516A (en) * 1971-08-26 1973-04-25
JPS4984589A (en) * 1972-12-19 1974-08-14

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5698019A (en) * 1979-12-31 1981-08-07 Nippon Dempa Kogyo Co Ltd Lead wire connecting method for tuning fork type quartz oscillator
JPS5698020A (en) * 1979-12-31 1981-08-07 Nippon Dempa Kogyo Co Ltd Lead wire connection method for tuning fork type quartz oscillator

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