JPS53132260A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS53132260A JPS53132260A JP4702577A JP4702577A JPS53132260A JP S53132260 A JPS53132260 A JP S53132260A JP 4702577 A JP4702577 A JP 4702577A JP 4702577 A JP4702577 A JP 4702577A JP S53132260 A JPS53132260 A JP S53132260A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- production
- produce
- high speed
- epitaxial layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To produce a high speed semiconductor device by using a thin epitaxial layer.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4702577A JPS53132260A (en) | 1977-04-22 | 1977-04-22 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4702577A JPS53132260A (en) | 1977-04-22 | 1977-04-22 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53132260A true JPS53132260A (en) | 1978-11-17 |
Family
ID=12763626
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4702577A Pending JPS53132260A (en) | 1977-04-22 | 1977-04-22 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53132260A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5358881A (en) * | 1993-05-19 | 1994-10-25 | Hewlett-Packard Company | Silicon topography control method |
-
1977
- 1977-04-22 JP JP4702577A patent/JPS53132260A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5358881A (en) * | 1993-05-19 | 1994-10-25 | Hewlett-Packard Company | Silicon topography control method |
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