JPS53132260A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS53132260A
JPS53132260A JP4702577A JP4702577A JPS53132260A JP S53132260 A JPS53132260 A JP S53132260A JP 4702577 A JP4702577 A JP 4702577A JP 4702577 A JP4702577 A JP 4702577A JP S53132260 A JPS53132260 A JP S53132260A
Authority
JP
Japan
Prior art keywords
semiconductor device
production
produce
high speed
epitaxial layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4702577A
Other languages
Japanese (ja)
Inventor
Hiroo Sasaki
Hajime Kamioka
Yoshio Akai
Akira Fujinuma
Mikio Takagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP4702577A priority Critical patent/JPS53132260A/en
Publication of JPS53132260A publication Critical patent/JPS53132260A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To produce a high speed semiconductor device by using a thin epitaxial layer.
COPYRIGHT: (C)1978,JPO&Japio
JP4702577A 1977-04-22 1977-04-22 Production of semiconductor device Pending JPS53132260A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4702577A JPS53132260A (en) 1977-04-22 1977-04-22 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4702577A JPS53132260A (en) 1977-04-22 1977-04-22 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS53132260A true JPS53132260A (en) 1978-11-17

Family

ID=12763626

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4702577A Pending JPS53132260A (en) 1977-04-22 1977-04-22 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS53132260A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5358881A (en) * 1993-05-19 1994-10-25 Hewlett-Packard Company Silicon topography control method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5358881A (en) * 1993-05-19 1994-10-25 Hewlett-Packard Company Silicon topography control method

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