JPS53116782A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS53116782A
JPS53116782A JP3126677A JP3126677A JPS53116782A JP S53116782 A JPS53116782 A JP S53116782A JP 3126677 A JP3126677 A JP 3126677A JP 3126677 A JP3126677 A JP 3126677A JP S53116782 A JPS53116782 A JP S53116782A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
sio
film
production apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3126677A
Other languages
Japanese (ja)
Inventor
Masato Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP3126677A priority Critical patent/JPS53116782A/en
Publication of JPS53116782A publication Critical patent/JPS53116782A/en
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)

Abstract

PURPOSE: To form a SiO2 film of desired patterns readily without using any special production apparatus.
COPYRIGHT: (C)1978,JPO&Japio
JP3126677A 1977-03-22 1977-03-22 Production of semiconductor device Pending JPS53116782A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3126677A JPS53116782A (en) 1977-03-22 1977-03-22 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3126677A JPS53116782A (en) 1977-03-22 1977-03-22 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS53116782A true JPS53116782A (en) 1978-10-12

Family

ID=12326528

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3126677A Pending JPS53116782A (en) 1977-03-22 1977-03-22 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS53116782A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5621332A (en) * 1979-07-31 1981-02-27 Fujitsu Ltd Manufacture of semiconductor device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49120584A (en) * 1973-03-16 1974-11-18
JPS5040077A (en) * 1973-08-14 1975-04-12

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49120584A (en) * 1973-03-16 1974-11-18
JPS5040077A (en) * 1973-08-14 1975-04-12

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5621332A (en) * 1979-07-31 1981-02-27 Fujitsu Ltd Manufacture of semiconductor device

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