JPS53121472A - Exposure unit - Google Patents
Exposure unitInfo
- Publication number
- JPS53121472A JPS53121472A JP3545077A JP3545077A JPS53121472A JP S53121472 A JPS53121472 A JP S53121472A JP 3545077 A JP3545077 A JP 3545077A JP 3545077 A JP3545077 A JP 3545077A JP S53121472 A JPS53121472 A JP S53121472A
- Authority
- JP
- Japan
- Prior art keywords
- exposure unit
- alignment
- pattern
- difficult
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
PURPOSE: To make the exposing unit making easy for the alignment, even if the mask alignment is difficult with too slight height of unevenness forming the pattern of the semiconductor substrate.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3545077A JPS53121472A (en) | 1977-03-31 | 1977-03-31 | Exposure unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3545077A JPS53121472A (en) | 1977-03-31 | 1977-03-31 | Exposure unit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53121472A true JPS53121472A (en) | 1978-10-23 |
Family
ID=12442144
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3545077A Pending JPS53121472A (en) | 1977-03-31 | 1977-03-31 | Exposure unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53121472A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003094212A1 (en) * | 2002-05-01 | 2003-11-13 | Sony Corporation | Alignment system, alignment method and production method for semiconductor device |
-
1977
- 1977-03-31 JP JP3545077A patent/JPS53121472A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003094212A1 (en) * | 2002-05-01 | 2003-11-13 | Sony Corporation | Alignment system, alignment method and production method for semiconductor device |
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