JPS53121472A - Exposure unit - Google Patents

Exposure unit

Info

Publication number
JPS53121472A
JPS53121472A JP3545077A JP3545077A JPS53121472A JP S53121472 A JPS53121472 A JP S53121472A JP 3545077 A JP3545077 A JP 3545077A JP 3545077 A JP3545077 A JP 3545077A JP S53121472 A JPS53121472 A JP S53121472A
Authority
JP
Japan
Prior art keywords
exposure unit
alignment
pattern
difficult
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3545077A
Other languages
Japanese (ja)
Inventor
Tomoko Takahashi
Katsuhiro Kawabuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3545077A priority Critical patent/JPS53121472A/en
Publication of JPS53121472A publication Critical patent/JPS53121472A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: To make the exposing unit making easy for the alignment, even if the mask alignment is difficult with too slight height of unevenness forming the pattern of the semiconductor substrate.
COPYRIGHT: (C)1978,JPO&Japio
JP3545077A 1977-03-31 1977-03-31 Exposure unit Pending JPS53121472A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3545077A JPS53121472A (en) 1977-03-31 1977-03-31 Exposure unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3545077A JPS53121472A (en) 1977-03-31 1977-03-31 Exposure unit

Publications (1)

Publication Number Publication Date
JPS53121472A true JPS53121472A (en) 1978-10-23

Family

ID=12442144

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3545077A Pending JPS53121472A (en) 1977-03-31 1977-03-31 Exposure unit

Country Status (1)

Country Link
JP (1) JPS53121472A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003094212A1 (en) * 2002-05-01 2003-11-13 Sony Corporation Alignment system, alignment method and production method for semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003094212A1 (en) * 2002-05-01 2003-11-13 Sony Corporation Alignment system, alignment method and production method for semiconductor device

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