JPS5361286A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5361286A JPS5361286A JP13640776A JP13640776A JPS5361286A JP S5361286 A JPS5361286 A JP S5361286A JP 13640776 A JP13640776 A JP 13640776A JP 13640776 A JP13640776 A JP 13640776A JP S5361286 A JPS5361286 A JP S5361286A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- increase
- integration
- resolution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
Abstract
PURPOSE: To increase the resolution of pattern, obtain fine patterns and increase the scale of integration by providing the processes of performing exposure through the use of a positive type photoresist then applying baking and making development.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13640776A JPS5917541B2 (en) | 1976-11-15 | 1976-11-15 | Manufacturing method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13640776A JPS5917541B2 (en) | 1976-11-15 | 1976-11-15 | Manufacturing method of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5361286A true JPS5361286A (en) | 1978-06-01 |
JPS5917541B2 JPS5917541B2 (en) | 1984-04-21 |
Family
ID=15174432
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13640776A Expired JPS5917541B2 (en) | 1976-11-15 | 1976-11-15 | Manufacturing method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5917541B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57199222A (en) * | 1981-06-02 | 1982-12-07 | Nippon Telegr & Teleph Corp <Ntt> | Control of cross-section of lift-off resist stencil |
-
1976
- 1976-11-15 JP JP13640776A patent/JPS5917541B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57199222A (en) * | 1981-06-02 | 1982-12-07 | Nippon Telegr & Teleph Corp <Ntt> | Control of cross-section of lift-off resist stencil |
Also Published As
Publication number | Publication date |
---|---|
JPS5917541B2 (en) | 1984-04-21 |
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