JPS52111382A - Photo-mask producing for semi-conductor - Google Patents
Photo-mask producing for semi-conductorInfo
- Publication number
- JPS52111382A JPS52111382A JP2850376A JP2850376A JPS52111382A JP S52111382 A JPS52111382 A JP S52111382A JP 2850376 A JP2850376 A JP 2850376A JP 2850376 A JP2850376 A JP 2850376A JP S52111382 A JPS52111382 A JP S52111382A
- Authority
- JP
- Japan
- Prior art keywords
- photo
- conductor
- semi
- mask producing
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To atain a photo-mask for semi-conductor by forming a desired pattern on a photo-sensitive material coated by photo-sensitive substance in multiple layers on a stransparent base 1 coated by metal oxide using photoengraving.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2850376A JPS52111382A (en) | 1976-03-16 | 1976-03-16 | Photo-mask producing for semi-conductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2850376A JPS52111382A (en) | 1976-03-16 | 1976-03-16 | Photo-mask producing for semi-conductor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52111382A true JPS52111382A (en) | 1977-09-19 |
Family
ID=12250470
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2850376A Pending JPS52111382A (en) | 1976-03-16 | 1976-03-16 | Photo-mask producing for semi-conductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52111382A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59180560A (en) * | 1983-03-31 | 1984-10-13 | Fujitsu Ltd | Photomask |
US6303262B1 (en) | 1998-06-18 | 2001-10-16 | Mitsubishi Paper Mills Ltd. | Photomask material, photomask and methods for the production thereof |
-
1976
- 1976-03-16 JP JP2850376A patent/JPS52111382A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59180560A (en) * | 1983-03-31 | 1984-10-13 | Fujitsu Ltd | Photomask |
US6303262B1 (en) | 1998-06-18 | 2001-10-16 | Mitsubishi Paper Mills Ltd. | Photomask material, photomask and methods for the production thereof |
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