JPS52111382A - Photo-mask producing for semi-conductor - Google Patents

Photo-mask producing for semi-conductor

Info

Publication number
JPS52111382A
JPS52111382A JP2850376A JP2850376A JPS52111382A JP S52111382 A JPS52111382 A JP S52111382A JP 2850376 A JP2850376 A JP 2850376A JP 2850376 A JP2850376 A JP 2850376A JP S52111382 A JPS52111382 A JP S52111382A
Authority
JP
Japan
Prior art keywords
photo
conductor
semi
mask producing
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2850376A
Other languages
Japanese (ja)
Inventor
Yukimichi Kanedaki
Isao Yamaha
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2850376A priority Critical patent/JPS52111382A/en
Publication of JPS52111382A publication Critical patent/JPS52111382A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To atain a photo-mask for semi-conductor by forming a desired pattern on a photo-sensitive material coated by photo-sensitive substance in multiple layers on a stransparent base 1 coated by metal oxide using photoengraving.
COPYRIGHT: (C)1977,JPO&Japio
JP2850376A 1976-03-16 1976-03-16 Photo-mask producing for semi-conductor Pending JPS52111382A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2850376A JPS52111382A (en) 1976-03-16 1976-03-16 Photo-mask producing for semi-conductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2850376A JPS52111382A (en) 1976-03-16 1976-03-16 Photo-mask producing for semi-conductor

Publications (1)

Publication Number Publication Date
JPS52111382A true JPS52111382A (en) 1977-09-19

Family

ID=12250470

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2850376A Pending JPS52111382A (en) 1976-03-16 1976-03-16 Photo-mask producing for semi-conductor

Country Status (1)

Country Link
JP (1) JPS52111382A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59180560A (en) * 1983-03-31 1984-10-13 Fujitsu Ltd Photomask
US6303262B1 (en) 1998-06-18 2001-10-16 Mitsubishi Paper Mills Ltd. Photomask material, photomask and methods for the production thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59180560A (en) * 1983-03-31 1984-10-13 Fujitsu Ltd Photomask
US6303262B1 (en) 1998-06-18 2001-10-16 Mitsubishi Paper Mills Ltd. Photomask material, photomask and methods for the production thereof

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