JPS52117558A - Soft x-ray exposure mask and its manufacturing method - Google Patents

Soft x-ray exposure mask and its manufacturing method

Info

Publication number
JPS52117558A
JPS52117558A JP3483376A JP3483376A JPS52117558A JP S52117558 A JPS52117558 A JP S52117558A JP 3483376 A JP3483376 A JP 3483376A JP 3483376 A JP3483376 A JP 3483376A JP S52117558 A JPS52117558 A JP S52117558A
Authority
JP
Japan
Prior art keywords
soft
ray exposure
exposure mask
manufacturing
classifying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3483376A
Other languages
Japanese (ja)
Other versions
JPS5923105B2 (en
Inventor
Takashi Matsuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP51034833A priority Critical patent/JPS5923105B2/en
Priority to US05/782,379 priority patent/US4198263A/en
Publication of JPS52117558A publication Critical patent/JPS52117558A/en
Publication of JPS5923105B2 publication Critical patent/JPS5923105B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To form mask pattern at inner side with thinner depth than circumference support material of Si substrate by classifying selective etching into two stages. As a result, soft X-ray exposure mask can be obtained with uniform surface.
COPYRIGHT: (C)1977,JPO&Japio
JP51034833A 1976-03-30 1976-03-30 Manufacturing method for soft X-ray exposure mask Expired JPS5923105B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP51034833A JPS5923105B2 (en) 1976-03-30 1976-03-30 Manufacturing method for soft X-ray exposure mask
US05/782,379 US4198263A (en) 1976-03-30 1977-03-29 Mask for soft X-rays and method of manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51034833A JPS5923105B2 (en) 1976-03-30 1976-03-30 Manufacturing method for soft X-ray exposure mask

Publications (2)

Publication Number Publication Date
JPS52117558A true JPS52117558A (en) 1977-10-03
JPS5923105B2 JPS5923105B2 (en) 1984-05-30

Family

ID=12425192

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51034833A Expired JPS5923105B2 (en) 1976-03-30 1976-03-30 Manufacturing method for soft X-ray exposure mask

Country Status (1)

Country Link
JP (1) JPS5923105B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5312274A (en) * 1976-07-21 1978-02-03 Oki Electric Ind Co Ltd Production of mask for x-ray exposure
JPS5313879A (en) * 1976-07-23 1978-02-07 Nec Corp Silicon mask for x-ray exposure and its production
JPS56132343A (en) * 1980-03-22 1981-10-16 Chiyou Lsi Gijutsu Kenkyu Kumiai Mask for x-ray exposure and its manufacture

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6286002U (en) * 1985-11-19 1987-06-01
JPH0446315U (en) * 1990-08-24 1992-04-20
JPH0517097U (en) * 1991-08-12 1993-03-05 積水ハウス株式会社 Integrated post with stained light

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5312274A (en) * 1976-07-21 1978-02-03 Oki Electric Ind Co Ltd Production of mask for x-ray exposure
JPS5444636B2 (en) * 1976-07-21 1979-12-27
JPS5313879A (en) * 1976-07-23 1978-02-07 Nec Corp Silicon mask for x-ray exposure and its production
JPS541625B2 (en) * 1976-07-23 1979-01-26
JPS56132343A (en) * 1980-03-22 1981-10-16 Chiyou Lsi Gijutsu Kenkyu Kumiai Mask for x-ray exposure and its manufacture
JPS631740B2 (en) * 1980-03-22 1988-01-13 Cho Eru Esu Ai Gijutsu Kenkyu Kumiai

Also Published As

Publication number Publication date
JPS5923105B2 (en) 1984-05-30

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