JPS5384477A - Forming method of dry etching mask - Google Patents

Forming method of dry etching mask

Info

Publication number
JPS5384477A
JPS5384477A JP16023476A JP16023476A JPS5384477A JP S5384477 A JPS5384477 A JP S5384477A JP 16023476 A JP16023476 A JP 16023476A JP 16023476 A JP16023476 A JP 16023476A JP S5384477 A JPS5384477 A JP S5384477A
Authority
JP
Japan
Prior art keywords
forming method
dry etching
etching mask
layer
etching rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16023476A
Other languages
Japanese (ja)
Inventor
Sumio Yamamoto
Osamu Wada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16023476A priority Critical patent/JPS5384477A/en
Publication of JPS5384477A publication Critical patent/JPS5384477A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To reduce the deformation and to avoid the lowering of the pattern accuracy, by anode-oxidizing the metal mask used for the selective etching to turn the surface into a layer of the low etching rate or by changing the mask itself into a low etching rate layer.
COPYRIGHT: (C)1978,JPO&Japio
JP16023476A 1976-12-29 1976-12-29 Forming method of dry etching mask Pending JPS5384477A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16023476A JPS5384477A (en) 1976-12-29 1976-12-29 Forming method of dry etching mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16023476A JPS5384477A (en) 1976-12-29 1976-12-29 Forming method of dry etching mask

Publications (1)

Publication Number Publication Date
JPS5384477A true JPS5384477A (en) 1978-07-25

Family

ID=15710596

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16023476A Pending JPS5384477A (en) 1976-12-29 1976-12-29 Forming method of dry etching mask

Country Status (1)

Country Link
JP (1) JPS5384477A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6196765A (en) * 1984-10-17 1986-05-15 Toshiba Corp Method for forming metal pattern
JP2015213208A (en) * 2014-05-01 2015-11-26 セイコーエプソン株式会社 Manufacturing method of functional device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6196765A (en) * 1984-10-17 1986-05-15 Toshiba Corp Method for forming metal pattern
JP2015213208A (en) * 2014-05-01 2015-11-26 セイコーエプソン株式会社 Manufacturing method of functional device

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