JPS5384477A - Forming method of dry etching mask - Google Patents
Forming method of dry etching maskInfo
- Publication number
- JPS5384477A JPS5384477A JP16023476A JP16023476A JPS5384477A JP S5384477 A JPS5384477 A JP S5384477A JP 16023476 A JP16023476 A JP 16023476A JP 16023476 A JP16023476 A JP 16023476A JP S5384477 A JPS5384477 A JP S5384477A
- Authority
- JP
- Japan
- Prior art keywords
- forming method
- dry etching
- etching mask
- layer
- etching rate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To reduce the deformation and to avoid the lowering of the pattern accuracy, by anode-oxidizing the metal mask used for the selective etching to turn the surface into a layer of the low etching rate or by changing the mask itself into a low etching rate layer.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16023476A JPS5384477A (en) | 1976-12-29 | 1976-12-29 | Forming method of dry etching mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16023476A JPS5384477A (en) | 1976-12-29 | 1976-12-29 | Forming method of dry etching mask |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5384477A true JPS5384477A (en) | 1978-07-25 |
Family
ID=15710596
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16023476A Pending JPS5384477A (en) | 1976-12-29 | 1976-12-29 | Forming method of dry etching mask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5384477A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6196765A (en) * | 1984-10-17 | 1986-05-15 | Toshiba Corp | Method for forming metal pattern |
JP2015213208A (en) * | 2014-05-01 | 2015-11-26 | セイコーエプソン株式会社 | Manufacturing method of functional device |
-
1976
- 1976-12-29 JP JP16023476A patent/JPS5384477A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6196765A (en) * | 1984-10-17 | 1986-05-15 | Toshiba Corp | Method for forming metal pattern |
JP2015213208A (en) * | 2014-05-01 | 2015-11-26 | セイコーエプソン株式会社 | Manufacturing method of functional device |
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