JPS5432068A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5432068A JPS5432068A JP9777577A JP9777577A JPS5432068A JP S5432068 A JPS5432068 A JP S5432068A JP 9777577 A JP9777577 A JP 9777577A JP 9777577 A JP9777577 A JP 9777577A JP S5432068 A JPS5432068 A JP S5432068A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- etching
- iwth
- course
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To prevent the lateral etching and thus to secure formation of a pattern in a fixed measurement, by coating the side surface of the aperture part iwth the negative resist in the course of etching and then carrying out etching again.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9777577A JPS5432068A (en) | 1977-08-17 | 1977-08-17 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9777577A JPS5432068A (en) | 1977-08-17 | 1977-08-17 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5432068A true JPS5432068A (en) | 1979-03-09 |
Family
ID=14201204
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9777577A Pending JPS5432068A (en) | 1977-08-17 | 1977-08-17 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5432068A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56164530A (en) * | 1980-05-22 | 1981-12-17 | Sanyo Electric Co Ltd | Formation of contacting hole of semiconductor device |
JPS5854631A (en) * | 1981-09-28 | 1983-03-31 | Nec Corp | Manufacture of semiconductor device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4949267A (en) * | 1972-09-16 | 1974-05-13 |
-
1977
- 1977-08-17 JP JP9777577A patent/JPS5432068A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4949267A (en) * | 1972-09-16 | 1974-05-13 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56164530A (en) * | 1980-05-22 | 1981-12-17 | Sanyo Electric Co Ltd | Formation of contacting hole of semiconductor device |
JPS5854631A (en) * | 1981-09-28 | 1983-03-31 | Nec Corp | Manufacture of semiconductor device |
JPS6216536B2 (en) * | 1981-09-28 | 1987-04-13 | Nippon Electric Co |
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