JPS5432068A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5432068A
JPS5432068A JP9777577A JP9777577A JPS5432068A JP S5432068 A JPS5432068 A JP S5432068A JP 9777577 A JP9777577 A JP 9777577A JP 9777577 A JP9777577 A JP 9777577A JP S5432068 A JPS5432068 A JP S5432068A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
etching
iwth
course
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9777577A
Other languages
Japanese (ja)
Inventor
Kazufumi Nakamura
Eiji Hashimoto
Sunao Nishimuro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP9777577A priority Critical patent/JPS5432068A/en
Publication of JPS5432068A publication Critical patent/JPS5432068A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To prevent the lateral etching and thus to secure formation of a pattern in a fixed measurement, by coating the side surface of the aperture part iwth the negative resist in the course of etching and then carrying out etching again.
COPYRIGHT: (C)1979,JPO&Japio
JP9777577A 1977-08-17 1977-08-17 Manufacture of semiconductor device Pending JPS5432068A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9777577A JPS5432068A (en) 1977-08-17 1977-08-17 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9777577A JPS5432068A (en) 1977-08-17 1977-08-17 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5432068A true JPS5432068A (en) 1979-03-09

Family

ID=14201204

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9777577A Pending JPS5432068A (en) 1977-08-17 1977-08-17 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5432068A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56164530A (en) * 1980-05-22 1981-12-17 Sanyo Electric Co Ltd Formation of contacting hole of semiconductor device
JPS5854631A (en) * 1981-09-28 1983-03-31 Nec Corp Manufacture of semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4949267A (en) * 1972-09-16 1974-05-13

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4949267A (en) * 1972-09-16 1974-05-13

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56164530A (en) * 1980-05-22 1981-12-17 Sanyo Electric Co Ltd Formation of contacting hole of semiconductor device
JPS5854631A (en) * 1981-09-28 1983-03-31 Nec Corp Manufacture of semiconductor device
JPS6216536B2 (en) * 1981-09-28 1987-04-13 Nippon Electric Co

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