JPS5384475A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5384475A
JPS5384475A JP15950676A JP15950676A JPS5384475A JP S5384475 A JPS5384475 A JP S5384475A JP 15950676 A JP15950676 A JP 15950676A JP 15950676 A JP15950676 A JP 15950676A JP S5384475 A JPS5384475 A JP S5384475A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
resistivity
etching
stopping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15950676A
Other languages
Japanese (ja)
Inventor
Takeshi Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP15950676A priority Critical patent/JPS5384475A/en
Publication of JPS5384475A publication Critical patent/JPS5384475A/en
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE: To correct the dispersion of the patterning process, by measuring the resistivity of semiconductor pattern receiving the impurity doping while having a dry etching and stopping the etching when the resistivity reaches the prescribed level.
COPYRIGHT: (C)1978,JPO&Japio
JP15950676A 1976-12-29 1976-12-29 Manufacture of semiconductor device Pending JPS5384475A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15950676A JPS5384475A (en) 1976-12-29 1976-12-29 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15950676A JPS5384475A (en) 1976-12-29 1976-12-29 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5384475A true JPS5384475A (en) 1978-07-25

Family

ID=15695249

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15950676A Pending JPS5384475A (en) 1976-12-29 1976-12-29 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5384475A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS548465A (en) * 1977-06-22 1979-01-22 Hitachi Ltd Etching method
JPH05168202A (en) * 1991-12-13 1993-07-02 Sankyo Seiki Mfg Co Ltd Manufacture of thin type coil

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS548465A (en) * 1977-06-22 1979-01-22 Hitachi Ltd Etching method
JPH05168202A (en) * 1991-12-13 1993-07-02 Sankyo Seiki Mfg Co Ltd Manufacture of thin type coil

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