JPS5384475A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5384475A JPS5384475A JP15950676A JP15950676A JPS5384475A JP S5384475 A JPS5384475 A JP S5384475A JP 15950676 A JP15950676 A JP 15950676A JP 15950676 A JP15950676 A JP 15950676A JP S5384475 A JPS5384475 A JP S5384475A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- resistivity
- etching
- stopping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Abstract
PURPOSE: To correct the dispersion of the patterning process, by measuring the resistivity of semiconductor pattern receiving the impurity doping while having a dry etching and stopping the etching when the resistivity reaches the prescribed level.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15950676A JPS5384475A (en) | 1976-12-29 | 1976-12-29 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15950676A JPS5384475A (en) | 1976-12-29 | 1976-12-29 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5384475A true JPS5384475A (en) | 1978-07-25 |
Family
ID=15695249
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15950676A Pending JPS5384475A (en) | 1976-12-29 | 1976-12-29 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5384475A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS548465A (en) * | 1977-06-22 | 1979-01-22 | Hitachi Ltd | Etching method |
JPH05168202A (en) * | 1991-12-13 | 1993-07-02 | Sankyo Seiki Mfg Co Ltd | Manufacture of thin type coil |
-
1976
- 1976-12-29 JP JP15950676A patent/JPS5384475A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS548465A (en) * | 1977-06-22 | 1979-01-22 | Hitachi Ltd | Etching method |
JPH05168202A (en) * | 1991-12-13 | 1993-07-02 | Sankyo Seiki Mfg Co Ltd | Manufacture of thin type coil |
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