JPS546461A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS546461A
JPS546461A JP7110477A JP7110477A JPS546461A JP S546461 A JPS546461 A JP S546461A JP 7110477 A JP7110477 A JP 7110477A JP 7110477 A JP7110477 A JP 7110477A JP S546461 A JPS546461 A JP S546461A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
forming
density
highly reliable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7110477A
Other languages
Japanese (ja)
Inventor
Tatsu Ito
Kazutoshi Ashikawa
Kazuo Nojiri
Toshiaki Matsubara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7110477A priority Critical patent/JPS546461A/en
Publication of JPS546461A publication Critical patent/JPS546461A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Bipolar Transistors (AREA)

Abstract

PURPOSE: To obtain a highly reliable device by previously forming the surface of more than 5×1018 cm-3 in density through ion injection and by forming platinum silicide on the surface.
COPYRIGHT: (C)1979,JPO&Japio
JP7110477A 1977-06-17 1977-06-17 Manufacture of semiconductor device Pending JPS546461A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7110477A JPS546461A (en) 1977-06-17 1977-06-17 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7110477A JPS546461A (en) 1977-06-17 1977-06-17 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS546461A true JPS546461A (en) 1979-01-18

Family

ID=13450900

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7110477A Pending JPS546461A (en) 1977-06-17 1977-06-17 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS546461A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5223446A (en) * 1988-11-30 1993-06-29 Sharp Kabushiki Kaisha Semiconductor device with a photodetector switching device grown on a recrystallized monocrystal silicon film
US6051490A (en) * 1991-11-29 2000-04-18 Sony Corporation Method of forming wirings
US6268290B1 (en) * 1991-11-19 2001-07-31 Sony Corporation Method of forming wirings

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5223446A (en) * 1988-11-30 1993-06-29 Sharp Kabushiki Kaisha Semiconductor device with a photodetector switching device grown on a recrystallized monocrystal silicon film
US6268290B1 (en) * 1991-11-19 2001-07-31 Sony Corporation Method of forming wirings
US6051490A (en) * 1991-11-29 2000-04-18 Sony Corporation Method of forming wirings

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