JPS5329668A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5329668A
JPS5329668A JP10458776A JP10458776A JPS5329668A JP S5329668 A JPS5329668 A JP S5329668A JP 10458776 A JP10458776 A JP 10458776A JP 10458776 A JP10458776 A JP 10458776A JP S5329668 A JPS5329668 A JP S5329668A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
ohmic contact
amorphous
regions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10458776A
Other languages
Japanese (ja)
Inventor
Kenji Ichida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP10458776A priority Critical patent/JPS5329668A/en
Publication of JPS5329668A publication Critical patent/JPS5329668A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To make the surface of the regions for obtaining ohmic contact with Al amorphous by ion implantation and obtain ohmic contact through the thin amorphous layer thus obtained.
COPYRIGHT: (C)1978,JPO&Japio
JP10458776A 1976-08-31 1976-08-31 Production of semiconductor device Pending JPS5329668A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10458776A JPS5329668A (en) 1976-08-31 1976-08-31 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10458776A JPS5329668A (en) 1976-08-31 1976-08-31 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5329668A true JPS5329668A (en) 1978-03-20

Family

ID=14384558

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10458776A Pending JPS5329668A (en) 1976-08-31 1976-08-31 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5329668A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5394177A (en) * 1977-01-28 1978-08-17 Nippon Precision Circuits Semiconductor and method of producing same
JPS607126A (en) * 1983-06-27 1985-01-14 Toshiba Corp Manufacture of semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5394177A (en) * 1977-01-28 1978-08-17 Nippon Precision Circuits Semiconductor and method of producing same
JPS607126A (en) * 1983-06-27 1985-01-14 Toshiba Corp Manufacture of semiconductor device
JPH0510820B2 (en) * 1983-06-27 1993-02-10 Tokyo Shibaura Electric Co

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