JPS5253678A - Semiconductor integrated circuit and productin of the same - Google Patents
Semiconductor integrated circuit and productin of the sameInfo
- Publication number
- JPS5253678A JPS5253678A JP50129235A JP12923575A JPS5253678A JP S5253678 A JPS5253678 A JP S5253678A JP 50129235 A JP50129235 A JP 50129235A JP 12923575 A JP12923575 A JP 12923575A JP S5253678 A JPS5253678 A JP S5253678A
- Authority
- JP
- Japan
- Prior art keywords
- productin
- same
- integrated circuit
- semiconductor integrated
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Bipolar Integrated Circuits (AREA)
- Bipolar Transistors (AREA)
Abstract
PURPOSE: To obtain a high performance complementary type transistor by forming recesses of an arbitary depth by anisotropic etching and forming an epitaxial layer selectively therein by epitaxial growth and flattening etching.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50129235A JPS5253678A (en) | 1975-10-29 | 1975-10-29 | Semiconductor integrated circuit and productin of the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50129235A JPS5253678A (en) | 1975-10-29 | 1975-10-29 | Semiconductor integrated circuit and productin of the same |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5253678A true JPS5253678A (en) | 1977-04-30 |
Family
ID=15004505
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50129235A Pending JPS5253678A (en) | 1975-10-29 | 1975-10-29 | Semiconductor integrated circuit and productin of the same |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5253678A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53143183A (en) * | 1977-05-20 | 1978-12-13 | Hitachi Ltd | Semicondutor integrated circuit device and production of the same |
JPS548481A (en) * | 1977-06-22 | 1979-01-22 | Hitachi Ltd | Manufacture for semiconductor device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS492795A (en) * | 1972-03-13 | 1974-01-11 | ||
JPS495199A (en) * | 1971-03-25 | 1974-01-17 |
-
1975
- 1975-10-29 JP JP50129235A patent/JPS5253678A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS495199A (en) * | 1971-03-25 | 1974-01-17 | ||
JPS492795A (en) * | 1972-03-13 | 1974-01-11 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53143183A (en) * | 1977-05-20 | 1978-12-13 | Hitachi Ltd | Semicondutor integrated circuit device and production of the same |
JPS548481A (en) * | 1977-06-22 | 1979-01-22 | Hitachi Ltd | Manufacture for semiconductor device |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5269587A (en) | Device and manufacture for high voltage resisting semiconductor | |
JPS5351970A (en) | Manufacture for semiconductor substrate | |
JPS52140280A (en) | Semiconductor device | |
JPS5370687A (en) | Production of semiconductor device | |
JPS5253678A (en) | Semiconductor integrated circuit and productin of the same | |
JPS5333053A (en) | Production of semiconductor device | |
JPS5258483A (en) | Junction type field effect semiconductor device and its production | |
JPS51136289A (en) | Semi-conductor producing | |
JPS531471A (en) | Manufacture for semiconductor device | |
JPS52109369A (en) | Manufacture of semiconductor device | |
JPS5243385A (en) | Process for production of semiconductor integrated circuit | |
JPS5283071A (en) | Production of semiconductor device | |
JPS52130567A (en) | Preparation of semiconductor device | |
JPS5367372A (en) | Mos-type field effect transistor | |
JPS5265689A (en) | Semiconductor integrated circuit and its production | |
JPS5245290A (en) | Integrated circuit of semiconductor and method for its fabrication | |
JPS52141578A (en) | Manufacture of mos-type semiconductor device | |
JPS5349966A (en) | Manufacture of semiconductor integrated circuit | |
JPS538082A (en) | Production of semiconductor device | |
JPS536570A (en) | Preparation of semiconductor device | |
JPS5329668A (en) | Production of semiconductor device | |
JPS5245292A (en) | Device for integrated circuit of semiconductor | |
JPS526081A (en) | Semiconductor wafer | |
JPS5295985A (en) | Manufacture of semiconductor unit | |
JPS5217768A (en) | Production method of semi-conductor device |