JPS5253678A - Semiconductor integrated circuit and productin of the same - Google Patents

Semiconductor integrated circuit and productin of the same

Info

Publication number
JPS5253678A
JPS5253678A JP50129235A JP12923575A JPS5253678A JP S5253678 A JPS5253678 A JP S5253678A JP 50129235 A JP50129235 A JP 50129235A JP 12923575 A JP12923575 A JP 12923575A JP S5253678 A JPS5253678 A JP S5253678A
Authority
JP
Japan
Prior art keywords
productin
same
integrated circuit
semiconductor integrated
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50129235A
Other languages
Japanese (ja)
Inventor
Naonobu Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50129235A priority Critical patent/JPS5253678A/en
Publication of JPS5253678A publication Critical patent/JPS5253678A/en
Pending legal-status Critical Current

Links

Landscapes

  • Bipolar Integrated Circuits (AREA)
  • Bipolar Transistors (AREA)

Abstract

PURPOSE: To obtain a high performance complementary type transistor by forming recesses of an arbitary depth by anisotropic etching and forming an epitaxial layer selectively therein by epitaxial growth and flattening etching.
COPYRIGHT: (C)1977,JPO&Japio
JP50129235A 1975-10-29 1975-10-29 Semiconductor integrated circuit and productin of the same Pending JPS5253678A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50129235A JPS5253678A (en) 1975-10-29 1975-10-29 Semiconductor integrated circuit and productin of the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50129235A JPS5253678A (en) 1975-10-29 1975-10-29 Semiconductor integrated circuit and productin of the same

Publications (1)

Publication Number Publication Date
JPS5253678A true JPS5253678A (en) 1977-04-30

Family

ID=15004505

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50129235A Pending JPS5253678A (en) 1975-10-29 1975-10-29 Semiconductor integrated circuit and productin of the same

Country Status (1)

Country Link
JP (1) JPS5253678A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53143183A (en) * 1977-05-20 1978-12-13 Hitachi Ltd Semicondutor integrated circuit device and production of the same
JPS548481A (en) * 1977-06-22 1979-01-22 Hitachi Ltd Manufacture for semiconductor device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS492795A (en) * 1972-03-13 1974-01-11
JPS495199A (en) * 1971-03-25 1974-01-17

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS495199A (en) * 1971-03-25 1974-01-17
JPS492795A (en) * 1972-03-13 1974-01-11

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53143183A (en) * 1977-05-20 1978-12-13 Hitachi Ltd Semicondutor integrated circuit device and production of the same
JPS548481A (en) * 1977-06-22 1979-01-22 Hitachi Ltd Manufacture for semiconductor device

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