JPS536570A - Preparation of semiconductor device - Google Patents

Preparation of semiconductor device

Info

Publication number
JPS536570A
JPS536570A JP8119876A JP8119876A JPS536570A JP S536570 A JPS536570 A JP S536570A JP 8119876 A JP8119876 A JP 8119876A JP 8119876 A JP8119876 A JP 8119876A JP S536570 A JPS536570 A JP S536570A
Authority
JP
Japan
Prior art keywords
preparation
semiconductor device
phosphorus
mesa groove
enhance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8119876A
Other languages
Japanese (ja)
Inventor
Takahiko Ichimura
Tomihisa Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP8119876A priority Critical patent/JPS536570A/en
Publication of JPS536570A publication Critical patent/JPS536570A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To enhance the gettering effect of phosphorus by forming a phosphorus diffusion region on a portion in which a mesa groove is to be formed, prior to formation of the mesa groove.
COPYRIGHT: (C)1978,JPO&Japio
JP8119876A 1976-07-07 1976-07-07 Preparation of semiconductor device Pending JPS536570A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8119876A JPS536570A (en) 1976-07-07 1976-07-07 Preparation of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8119876A JPS536570A (en) 1976-07-07 1976-07-07 Preparation of semiconductor device

Publications (1)

Publication Number Publication Date
JPS536570A true JPS536570A (en) 1978-01-21

Family

ID=13739767

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8119876A Pending JPS536570A (en) 1976-07-07 1976-07-07 Preparation of semiconductor device

Country Status (1)

Country Link
JP (1) JPS536570A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59152861A (en) * 1983-02-22 1984-08-31 Hoei Fuji Kogyo Kk Thermal transfer method and apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59152861A (en) * 1983-02-22 1984-08-31 Hoei Fuji Kogyo Kk Thermal transfer method and apparatus
JPH032061B2 (en) * 1983-02-22 1991-01-14 Hoei Fuji Kogyo Kk

Similar Documents

Publication Publication Date Title
JPS543479A (en) Semiconductor device and its manufacture
JPS5356972A (en) Mesa type semiconductor device
JPS53124087A (en) Manufacture of semiconductor device
JPS536570A (en) Preparation of semiconductor device
JPS5338271A (en) Semiconductor device
JPS52109369A (en) Manufacture of semiconductor device
JPS5363871A (en) Production of semiconductor device
JPS5313366A (en) Manufacture of mesa-type semiconductor device
JPS5339081A (en) Semiconductor device
JPS52153383A (en) Preparation of semiconductor device
JPS52130567A (en) Preparation of semiconductor device
JPS5253678A (en) Semiconductor integrated circuit and productin of the same
JPS5335386A (en) Production of semiconductor device
JPS5363866A (en) Production of semiconductor device
JPS5378780A (en) Preparation for semiconductor device
JPS52179A (en) Method of fabricating semiconductor
JPS5217768A (en) Production method of semi-conductor device
JPS52154343A (en) Production of semiconductor device
JPS5353255A (en) Manufacture of semiconductor device
JPS53145580A (en) Pnp transistor
JPS52101968A (en) Preparation of semiconductor device
JPS528787A (en) Semiconductor device process
JPS5374383A (en) Manufacture of compound semiconductor device
JPS5287373A (en) Production of semiconductor device
JPS5373990A (en) Semiconductor device