JPS536570A - Preparation of semiconductor device - Google Patents
Preparation of semiconductor deviceInfo
- Publication number
- JPS536570A JPS536570A JP8119876A JP8119876A JPS536570A JP S536570 A JPS536570 A JP S536570A JP 8119876 A JP8119876 A JP 8119876A JP 8119876 A JP8119876 A JP 8119876A JP S536570 A JPS536570 A JP S536570A
- Authority
- JP
- Japan
- Prior art keywords
- preparation
- semiconductor device
- phosphorus
- mesa groove
- enhance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To enhance the gettering effect of phosphorus by forming a phosphorus diffusion region on a portion in which a mesa groove is to be formed, prior to formation of the mesa groove.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8119876A JPS536570A (en) | 1976-07-07 | 1976-07-07 | Preparation of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8119876A JPS536570A (en) | 1976-07-07 | 1976-07-07 | Preparation of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS536570A true JPS536570A (en) | 1978-01-21 |
Family
ID=13739767
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8119876A Pending JPS536570A (en) | 1976-07-07 | 1976-07-07 | Preparation of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS536570A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59152861A (en) * | 1983-02-22 | 1984-08-31 | Hoei Fuji Kogyo Kk | Thermal transfer method and apparatus |
-
1976
- 1976-07-07 JP JP8119876A patent/JPS536570A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59152861A (en) * | 1983-02-22 | 1984-08-31 | Hoei Fuji Kogyo Kk | Thermal transfer method and apparatus |
JPH032061B2 (en) * | 1983-02-22 | 1991-01-14 | Hoei Fuji Kogyo Kk |
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