JPS5258483A - Junction type field effect semiconductor device and its production - Google Patents
Junction type field effect semiconductor device and its productionInfo
- Publication number
- JPS5258483A JPS5258483A JP13405575A JP13405575A JPS5258483A JP S5258483 A JPS5258483 A JP S5258483A JP 13405575 A JP13405575 A JP 13405575A JP 13405575 A JP13405575 A JP 13405575A JP S5258483 A JPS5258483 A JP S5258483A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- field effect
- type field
- junction type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Junction Field-Effect Transistors (AREA)
Abstract
PURPOSE: To improve the scale of integration of J-FETs and reduce the variation in impurity concentration, by forming a gate region by impurity diffusion in deep grooves formed in an Si substrate through the use of anisotropic etching.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13405575A JPS5258483A (en) | 1975-11-10 | 1975-11-10 | Junction type field effect semiconductor device and its production |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13405575A JPS5258483A (en) | 1975-11-10 | 1975-11-10 | Junction type field effect semiconductor device and its production |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5258483A true JPS5258483A (en) | 1977-05-13 |
Family
ID=15119297
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13405575A Pending JPS5258483A (en) | 1975-11-10 | 1975-11-10 | Junction type field effect semiconductor device and its production |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5258483A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5491074A (en) * | 1977-12-28 | 1979-07-19 | Seiko Instr & Electronics Ltd | Semiconductor device |
JPS55134961A (en) * | 1979-04-10 | 1980-10-21 | Seiko Instr & Electronics Ltd | Semiconductor device and its preparation |
JPS55154777A (en) * | 1979-05-21 | 1980-12-02 | Seiko Instr & Electronics Ltd | Manufacture of stepwise type semiconductor device |
JPS5635457A (en) * | 1979-08-30 | 1981-04-08 | Seiko Instr & Electronics Ltd | Integrated circuit device and manufacture thereof |
JPS5666076A (en) * | 1979-11-02 | 1981-06-04 | Tohoku Metal Ind Ltd | Semiconductor device |
US6037618A (en) * | 1998-02-17 | 2000-03-14 | Linear Integrated Systems, Inc. | Intergrated field effect transistor device for high power and voltage amplification of RF signals |
-
1975
- 1975-11-10 JP JP13405575A patent/JPS5258483A/en active Pending
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5491074A (en) * | 1977-12-28 | 1979-07-19 | Seiko Instr & Electronics Ltd | Semiconductor device |
JPS55134961A (en) * | 1979-04-10 | 1980-10-21 | Seiko Instr & Electronics Ltd | Semiconductor device and its preparation |
JPS55154777A (en) * | 1979-05-21 | 1980-12-02 | Seiko Instr & Electronics Ltd | Manufacture of stepwise type semiconductor device |
JPS6212675B2 (en) * | 1979-05-21 | 1987-03-19 | Seiko Denshi Kogyo Kk | |
JPS5635457A (en) * | 1979-08-30 | 1981-04-08 | Seiko Instr & Electronics Ltd | Integrated circuit device and manufacture thereof |
JPH0412029B2 (en) * | 1979-08-30 | 1992-03-03 | Seiko Instr & Electronics | |
JPS5666076A (en) * | 1979-11-02 | 1981-06-04 | Tohoku Metal Ind Ltd | Semiconductor device |
US6037618A (en) * | 1998-02-17 | 2000-03-14 | Linear Integrated Systems, Inc. | Intergrated field effect transistor device for high power and voltage amplification of RF signals |
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