JPS5373081A - Manufacture of mis-type semiconductor device - Google Patents

Manufacture of mis-type semiconductor device

Info

Publication number
JPS5373081A
JPS5373081A JP14910076A JP14910076A JPS5373081A JP S5373081 A JPS5373081 A JP S5373081A JP 14910076 A JP14910076 A JP 14910076A JP 14910076 A JP14910076 A JP 14910076A JP S5373081 A JPS5373081 A JP S5373081A
Authority
JP
Japan
Prior art keywords
mis
manufacture
semiconductor device
type semiconductor
diffusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14910076A
Other languages
Japanese (ja)
Inventor
Atsushi Nakano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14910076A priority Critical patent/JPS5373081A/en
Publication of JPS5373081A publication Critical patent/JPS5373081A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To obtain a compensated diffusion region by forming a shallow junction in an N-type source-drain region through the diffusion using As impurities and by performing the still deep diffusion with the use of the polycrystalline Si layer containing impurities.
COPYRIGHT: (C)1978,JPO&Japio
JP14910076A 1976-12-11 1976-12-11 Manufacture of mis-type semiconductor device Pending JPS5373081A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14910076A JPS5373081A (en) 1976-12-11 1976-12-11 Manufacture of mis-type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14910076A JPS5373081A (en) 1976-12-11 1976-12-11 Manufacture of mis-type semiconductor device

Publications (1)

Publication Number Publication Date
JPS5373081A true JPS5373081A (en) 1978-06-29

Family

ID=15467687

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14910076A Pending JPS5373081A (en) 1976-12-11 1976-12-11 Manufacture of mis-type semiconductor device

Country Status (1)

Country Link
JP (1) JPS5373081A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60220969A (en) * 1984-03-27 1985-11-05 Fuji Photo Film Co Ltd Photosensor
JPH02270334A (en) * 1990-02-26 1990-11-05 Seiko Epson Corp Semiconductor integrated circuit device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60220969A (en) * 1984-03-27 1985-11-05 Fuji Photo Film Co Ltd Photosensor
JPH02270334A (en) * 1990-02-26 1990-11-05 Seiko Epson Corp Semiconductor integrated circuit device

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