JPS5373081A - Manufacture of mis-type semiconductor device - Google Patents
Manufacture of mis-type semiconductor deviceInfo
- Publication number
- JPS5373081A JPS5373081A JP14910076A JP14910076A JPS5373081A JP S5373081 A JPS5373081 A JP S5373081A JP 14910076 A JP14910076 A JP 14910076A JP 14910076 A JP14910076 A JP 14910076A JP S5373081 A JPS5373081 A JP S5373081A
- Authority
- JP
- Japan
- Prior art keywords
- mis
- manufacture
- semiconductor device
- type semiconductor
- diffusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To obtain a compensated diffusion region by forming a shallow junction in an N-type source-drain region through the diffusion using As impurities and by performing the still deep diffusion with the use of the polycrystalline Si layer containing impurities.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14910076A JPS5373081A (en) | 1976-12-11 | 1976-12-11 | Manufacture of mis-type semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14910076A JPS5373081A (en) | 1976-12-11 | 1976-12-11 | Manufacture of mis-type semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5373081A true JPS5373081A (en) | 1978-06-29 |
Family
ID=15467687
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14910076A Pending JPS5373081A (en) | 1976-12-11 | 1976-12-11 | Manufacture of mis-type semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5373081A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60220969A (en) * | 1984-03-27 | 1985-11-05 | Fuji Photo Film Co Ltd | Photosensor |
JPH02270334A (en) * | 1990-02-26 | 1990-11-05 | Seiko Epson Corp | Semiconductor integrated circuit device |
-
1976
- 1976-12-11 JP JP14910076A patent/JPS5373081A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60220969A (en) * | 1984-03-27 | 1985-11-05 | Fuji Photo Film Co Ltd | Photosensor |
JPH02270334A (en) * | 1990-02-26 | 1990-11-05 | Seiko Epson Corp | Semiconductor integrated circuit device |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS52101990A (en) | Semiconductor device for photoelectric transducer and its manufacture | |
JPS5356972A (en) | Mesa type semiconductor device | |
JPS5373081A (en) | Manufacture of mis-type semiconductor device | |
JPS5338271A (en) | Semiconductor device | |
JPS5258483A (en) | Junction type field effect semiconductor device and its production | |
JPS5312289A (en) | Production of semiconductor device | |
JPS5417682A (en) | Semiconductor and its manufacture | |
JPS5339081A (en) | Semiconductor device | |
JPS5342567A (en) | Semiconductor device and its production | |
JPS5314585A (en) | Semiconductor device | |
JPS52117584A (en) | Mos type semiconductor device | |
JPS5214382A (en) | Semiconductor device | |
JPS52124888A (en) | Production of solar battery | |
JPS52117582A (en) | Mos type semiconductor device | |
JPS5376760A (en) | Semiconductor rectifying device | |
JPS5373990A (en) | Semiconductor device | |
JPS5321582A (en) | Mos type semiconductor device | |
JPS54586A (en) | Production of semiconductor device | |
JPS53137678A (en) | Manufacture for mos type semiconductor device | |
JPS52103982A (en) | Composite semiconductor device | |
JPS5310286A (en) | Production of semiconductor device | |
JPS5384690A (en) | Field effect transistor | |
JPS5347781A (en) | Production of silicon gate semiconductor device | |
JPS5316587A (en) | Semiconductor device | |
JPS52135274A (en) | Semiconductor device and its production |