JPS5350670A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5350670A JPS5350670A JP12574276A JP12574276A JPS5350670A JP S5350670 A JPS5350670 A JP S5350670A JP 12574276 A JP12574276 A JP 12574276A JP 12574276 A JP12574276 A JP 12574276A JP S5350670 A JPS5350670 A JP S5350670A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- layers
- controllabilty
- anodization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To form impurity diffused layers with good controllabilty by providing porous Si layers on a substrate through anodization by using an electrolyte containing an impurity followed by heat treatment.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51125742A JPS5917530B2 (en) | 1976-10-19 | 1976-10-19 | Manufacturing method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51125742A JPS5917530B2 (en) | 1976-10-19 | 1976-10-19 | Manufacturing method of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5350670A true JPS5350670A (en) | 1978-05-09 |
JPS5917530B2 JPS5917530B2 (en) | 1984-04-21 |
Family
ID=14917658
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51125742A Expired JPS5917530B2 (en) | 1976-10-19 | 1976-10-19 | Manufacturing method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5917530B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2655193A1 (en) * | 1989-11-30 | 1991-05-31 | Telemecanique | Symmetric power semi-conductor device and its method of fabrication |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5152789A (en) * | 1974-11-01 | 1976-05-10 | Mitsubishi Electric Corp | PUREENAGATAHANDOTAISOCHINO SEIZOHOHO |
JPS5177066A (en) * | 1974-12-27 | 1976-07-03 | New Nippon Electric Co | HANDOTAISOCHINOSEIZOHOHO |
-
1976
- 1976-10-19 JP JP51125742A patent/JPS5917530B2/en not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5152789A (en) * | 1974-11-01 | 1976-05-10 | Mitsubishi Electric Corp | PUREENAGATAHANDOTAISOCHINO SEIZOHOHO |
JPS5177066A (en) * | 1974-12-27 | 1976-07-03 | New Nippon Electric Co | HANDOTAISOCHINOSEIZOHOHO |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2655193A1 (en) * | 1989-11-30 | 1991-05-31 | Telemecanique | Symmetric power semi-conductor device and its method of fabrication |
Also Published As
Publication number | Publication date |
---|---|
JPS5917530B2 (en) | 1984-04-21 |
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