JPS5353971A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5353971A
JPS5353971A JP12905776A JP12905776A JPS5353971A JP S5353971 A JPS5353971 A JP S5353971A JP 12905776 A JP12905776 A JP 12905776A JP 12905776 A JP12905776 A JP 12905776A JP S5353971 A JPS5353971 A JP S5353971A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
prevent
contraction
insulator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12905776A
Other languages
Japanese (ja)
Inventor
Tatsunori Nakajima
Kosei Kajiwara
Kazutoshi Nagano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP12905776A priority Critical patent/JPS5353971A/en
Publication of JPS5353971A publication Critical patent/JPS5353971A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To prevent the contamination of an Al etching solution, prevent the contraction at the thermal oxidation and perform selective oxidation of flat surface by filling the porous column holes provided on the main surface of a substrate with an insulator and covering the surface with an insulation film.
COPYRIGHT: (C)1978,JPO&Japio
JP12905776A 1976-10-26 1976-10-26 Production of semiconductor device Pending JPS5353971A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12905776A JPS5353971A (en) 1976-10-26 1976-10-26 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12905776A JPS5353971A (en) 1976-10-26 1976-10-26 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5353971A true JPS5353971A (en) 1978-05-16

Family

ID=15000011

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12905776A Pending JPS5353971A (en) 1976-10-26 1976-10-26 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5353971A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59172739A (en) * 1983-03-22 1984-09-29 Toko Inc Semiconductor integrated circuit device and manufacture thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59172739A (en) * 1983-03-22 1984-09-29 Toko Inc Semiconductor integrated circuit device and manufacture thereof

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