JPS5353971A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5353971A JPS5353971A JP12905776A JP12905776A JPS5353971A JP S5353971 A JPS5353971 A JP S5353971A JP 12905776 A JP12905776 A JP 12905776A JP 12905776 A JP12905776 A JP 12905776A JP S5353971 A JPS5353971 A JP S5353971A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- prevent
- contraction
- insulator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To prevent the contamination of an Al etching solution, prevent the contraction at the thermal oxidation and perform selective oxidation of flat surface by filling the porous column holes provided on the main surface of a substrate with an insulator and covering the surface with an insulation film.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12905776A JPS5353971A (en) | 1976-10-26 | 1976-10-26 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12905776A JPS5353971A (en) | 1976-10-26 | 1976-10-26 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5353971A true JPS5353971A (en) | 1978-05-16 |
Family
ID=15000011
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12905776A Pending JPS5353971A (en) | 1976-10-26 | 1976-10-26 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5353971A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59172739A (en) * | 1983-03-22 | 1984-09-29 | Toko Inc | Semiconductor integrated circuit device and manufacture thereof |
-
1976
- 1976-10-26 JP JP12905776A patent/JPS5353971A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59172739A (en) * | 1983-03-22 | 1984-09-29 | Toko Inc | Semiconductor integrated circuit device and manufacture thereof |
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