JPS53126270A - Production of semiconductor devices - Google Patents

Production of semiconductor devices

Info

Publication number
JPS53126270A
JPS53126270A JP4038377A JP4038377A JPS53126270A JP S53126270 A JPS53126270 A JP S53126270A JP 4038377 A JP4038377 A JP 4038377A JP 4038377 A JP4038377 A JP 4038377A JP S53126270 A JPS53126270 A JP S53126270A
Authority
JP
Japan
Prior art keywords
production
semiconductor devices
substrate
film
utilization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4038377A
Other languages
Japanese (ja)
Inventor
Mitsumasa Koyanagi
Yuji Tanida
Shinpei Iijima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4038377A priority Critical patent/JPS53126270A/en
Publication of JPS53126270A publication Critical patent/JPS53126270A/en
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Formation Of Insulating Films (AREA)
  • Semiconductor Memories (AREA)

Abstract

PURPOSE: To make elements of a small area by covering the conductive electrodes formed on a substrate through an insulation film with a thick oxide film through the utilization of a Si3N4 film made by heating the Si substrate in an atmosphere containing N2 under above 1 atmospheric pressure.
COPYRIGHT: (C)1978,JPO&Japio
JP4038377A 1977-04-11 1977-04-11 Production of semiconductor devices Pending JPS53126270A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4038377A JPS53126270A (en) 1977-04-11 1977-04-11 Production of semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4038377A JPS53126270A (en) 1977-04-11 1977-04-11 Production of semiconductor devices

Publications (1)

Publication Number Publication Date
JPS53126270A true JPS53126270A (en) 1978-11-04

Family

ID=12579121

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4038377A Pending JPS53126270A (en) 1977-04-11 1977-04-11 Production of semiconductor devices

Country Status (1)

Country Link
JP (1) JPS53126270A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5526664A (en) * 1978-08-15 1980-02-26 Nec Corp Manufacturing semiconductor device
JPS55157266A (en) * 1979-05-25 1980-12-06 Chiyou Lsi Gijutsu Kenkyu Kumiai Semiconductor device
JPS5835090A (en) * 1981-08-24 1983-03-01 Toyota Motor Corp Laser working device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5526664A (en) * 1978-08-15 1980-02-26 Nec Corp Manufacturing semiconductor device
JPS6222445B2 (en) * 1978-08-15 1987-05-18 Nippon Electric Co
JPS55157266A (en) * 1979-05-25 1980-12-06 Chiyou Lsi Gijutsu Kenkyu Kumiai Semiconductor device
JPS5835090A (en) * 1981-08-24 1983-03-01 Toyota Motor Corp Laser working device

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