JPS53126270A - Production of semiconductor devices - Google Patents
Production of semiconductor devicesInfo
- Publication number
- JPS53126270A JPS53126270A JP4038377A JP4038377A JPS53126270A JP S53126270 A JPS53126270 A JP S53126270A JP 4038377 A JP4038377 A JP 4038377A JP 4038377 A JP4038377 A JP 4038377A JP S53126270 A JPS53126270 A JP S53126270A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor devices
- substrate
- film
- utilization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Local Oxidation Of Silicon (AREA)
- Formation Of Insulating Films (AREA)
- Semiconductor Memories (AREA)
Abstract
PURPOSE: To make elements of a small area by covering the conductive electrodes formed on a substrate through an insulation film with a thick oxide film through the utilization of a Si3N4 film made by heating the Si substrate in an atmosphere containing N2 under above 1 atmospheric pressure.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4038377A JPS53126270A (en) | 1977-04-11 | 1977-04-11 | Production of semiconductor devices |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4038377A JPS53126270A (en) | 1977-04-11 | 1977-04-11 | Production of semiconductor devices |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53126270A true JPS53126270A (en) | 1978-11-04 |
Family
ID=12579121
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4038377A Pending JPS53126270A (en) | 1977-04-11 | 1977-04-11 | Production of semiconductor devices |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53126270A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5526664A (en) * | 1978-08-15 | 1980-02-26 | Nec Corp | Manufacturing semiconductor device |
JPS55157266A (en) * | 1979-05-25 | 1980-12-06 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Semiconductor device |
JPS5835090A (en) * | 1981-08-24 | 1983-03-01 | Toyota Motor Corp | Laser working device |
-
1977
- 1977-04-11 JP JP4038377A patent/JPS53126270A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5526664A (en) * | 1978-08-15 | 1980-02-26 | Nec Corp | Manufacturing semiconductor device |
JPS6222445B2 (en) * | 1978-08-15 | 1987-05-18 | Nippon Electric Co | |
JPS55157266A (en) * | 1979-05-25 | 1980-12-06 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Semiconductor device |
JPS5835090A (en) * | 1981-08-24 | 1983-03-01 | Toyota Motor Corp | Laser working device |
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