JPS5240977A - Process for production of semiconductor device - Google Patents
Process for production of semiconductor deviceInfo
- Publication number
- JPS5240977A JPS5240977A JP11699275A JP11699275A JPS5240977A JP S5240977 A JPS5240977 A JP S5240977A JP 11699275 A JP11699275 A JP 11699275A JP 11699275 A JP11699275 A JP 11699275A JP S5240977 A JPS5240977 A JP S5240977A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- recess
- fill
- radiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To cover the surface of a semiconductor substrate of the portions other than a recess formed therein with a composite mask and fill the recess with radiation of oxygen ions, thereby forming a flat selective oxide film.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11699275A JPS5240977A (en) | 1975-09-26 | 1975-09-26 | Process for production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11699275A JPS5240977A (en) | 1975-09-26 | 1975-09-26 | Process for production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5240977A true JPS5240977A (en) | 1977-03-30 |
Family
ID=14700784
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11699275A Pending JPS5240977A (en) | 1975-09-26 | 1975-09-26 | Process for production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5240977A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5261973A (en) * | 1975-11-18 | 1977-05-21 | Mitsubishi Electric Corp | Production of semiconductor device |
JPS5632732A (en) * | 1979-08-27 | 1981-04-02 | Mitsubishi Electric Corp | Semiconductor device |
JPS5637635A (en) * | 1979-09-05 | 1981-04-11 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4918284A (en) * | 1972-06-09 | 1974-02-18 | ||
JPS49134285A (en) * | 1973-04-25 | 1974-12-24 | ||
JPS5160474A (en) * | 1974-11-22 | 1976-05-26 | Hitachi Ltd |
-
1975
- 1975-09-26 JP JP11699275A patent/JPS5240977A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4918284A (en) * | 1972-06-09 | 1974-02-18 | ||
JPS49134285A (en) * | 1973-04-25 | 1974-12-24 | ||
JPS5160474A (en) * | 1974-11-22 | 1976-05-26 | Hitachi Ltd |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5261973A (en) * | 1975-11-18 | 1977-05-21 | Mitsubishi Electric Corp | Production of semiconductor device |
JPS5632732A (en) * | 1979-08-27 | 1981-04-02 | Mitsubishi Electric Corp | Semiconductor device |
JPS6232615B2 (en) * | 1979-08-27 | 1987-07-15 | Mitsubishi Electric Corp | |
JPS5637635A (en) * | 1979-09-05 | 1981-04-11 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
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