JPS5419648A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5419648A
JPS5419648A JP8477477A JP8477477A JPS5419648A JP S5419648 A JPS5419648 A JP S5419648A JP 8477477 A JP8477477 A JP 8477477A JP 8477477 A JP8477477 A JP 8477477A JP S5419648 A JPS5419648 A JP S5419648A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
multilayers
simplification
improvement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8477477A
Other languages
Japanese (ja)
Inventor
Takashi Ito
Hidetoshi Nishi
Hajime Ishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP8477477A priority Critical patent/JPS5419648A/en
Publication of JPS5419648A publication Critical patent/JPS5419648A/en
Pending legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Abstract

PURPOSE: To enable extremely thin impurity layers to be formed in multilayers and achieve the simplification of process and the improvement of characteristics by performing ion radiation to the thin film deposited in a substrate semiconductor.
COPYRIGHT: (C)1979,JPO&Japio
JP8477477A 1977-07-15 1977-07-15 Production of semiconductor device Pending JPS5419648A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8477477A JPS5419648A (en) 1977-07-15 1977-07-15 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8477477A JPS5419648A (en) 1977-07-15 1977-07-15 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5419648A true JPS5419648A (en) 1979-02-14

Family

ID=13840014

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8477477A Pending JPS5419648A (en) 1977-07-15 1977-07-15 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5419648A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9023720B2 (en) 2010-08-26 2015-05-05 Sen Corporation Manufacturing method of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9023720B2 (en) 2010-08-26 2015-05-05 Sen Corporation Manufacturing method of semiconductor device

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